RAPID COMMUNICATION Plasma-Enhanced Chemical Vapor Deposition of Si-Rich Silicon Nitride Films Optimized for Waveguide-Based Sensing Applications in the Visible Range Pierre-Jean Zermatten, Abdelatif Jaouad, Sonia Blais, Arnaud Gorin, Vincent Aimez, and Paul G. Charette Jpn. J. Appl. Phys. 51 (2012) 110205 Reprinted from # 2012 The Japan Society of Applied Physics