See discussions, stats, and author profiles for this publication at: https://www.researchgate.net/publication/241611397 Combinatorial Methods Study of Confinement Effects on the Reaction Front in Ultrathin Chemically Amplified Photoresists ARTICLE · JANUARY 2003 DOI: 10.1063/1.1622510 READS 13 4 AUTHORS, INCLUDING: Eric Lin National Institute of Standards and Technolo… 223 PUBLICATIONS 3,969 CITATIONS SEE PROFILE Alamgir Karim University of Akron 307 PUBLICATIONS 6,980 CITATIONS SEE PROFILE Michael J. Fasolka National Institute of Standards and Technolo… 68 PUBLICATIONS 2,017 CITATIONS SEE PROFILE Available from: Alamgir Karim Retrieved on: 05 February 2016