Development of thin lm cathodes for lithium-ion batteries in the material system LiMnO by r.f. magnetron sputtering J. Fischer a, , C. Adelhelm a , T. Bergfeldt a , K. Chang b , C. Ziebert a , H. Leiste a , M. Stüber a , S. Ulrich a , D. Music b , B. Hallstedt b , H.J. Seifert a a Karlsruhe Institute of Technology (KIT), Institute for Applied Materials, Applied Materials Physics (IAM-AWP), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany b RWTH Aachen University, Materials Chemistry, Kopernikusstrasse 10, 46 52074 Aachen, Germany abstract article info Available online 6 November 2012 Keywords: Lithium-ion battery R.f. magnetron sputtering Thin lm cathode All-solid-state battery Lithium manganese oxide Physical vapor deposition Cubic spinel Orthorhombic lithium manganese oxide Today most commercially available lithium ion batteries are still based on the toxic and expensive LiCoO 2 as a standard cathode material. However, lithium manganese based cathode materials are cheaper and environ- mentally friendlier. In this work cubic-LiMn 2 O 4 spinel, monoclinic-Li 2 MnO 3 and orthorhombic-LiMnO 2 thin lms have been synthesized by non-reactive r.f. magnetron sputtering from two ceramic targets (LiMn 2 O 4 , LiMnO 2 ) in a pure argon discharge. The deposition parameters, namely target power and working gas pressure, were optimized in a combination with a post deposition heat treatment with respect to microstructure and electrochemical behavior. The chemical composition was determined using inductively coupled plasma optical emission spectroscopy and carrier gas hot extraction. The lms' crystal structure, phase evolution and morphology were investigated by X-ray diffraction, micro Raman spectroscopy and scanning electron microscopy. Due to the fact that these thin lms consist of the pure active material without any impurities, such as binders or conductive additives like carbon black, they are particularly well suited for measurements of the intrinsic physical properties, which is essential for fundamental understanding. The electrochemical behavior of the cubic and the orthorhombic lms was investigated by galvanostatic cycling in half cells against metallic lithium. The cubic spinel lms exhibit a maximum specic capacity of ~ 82 mAh/g, while a specic capacity of nearly 150 mAh/g can be reached for the orthorhombic counterparts. These lms are promising candidates for future all solid state battery applications. © 2012 Elsevier B.V. All rights reserved. 1. Introduction Thin lm rechargeable lithium ion batteries (LIBs) are of great in- terest for applications in stationary and portable power systems [1,2]. R.f. magnetron sputtering is an attractive technique to develop nano-composite cathode materials for powerful thin lm LIBs and to reveal fundamental physical properties without inuence of binder phases. The large electrochemically active surface areas can in turn give an increase in power density [3]. Nowadays, LiCoO 2 with the O3 structure is the most widely used cathode material for thin lm lithium ion batteries. Although LiCoO 2 possesses good reversibility and high capacity, the relatively high cost and safety problems limit its application [4]. In recent years, more and more attention has been paid to the lithium manganese ox- ides owing to their high energy density, low cost and environmental friendliness. Among them, LiMn 2 O 4 (cubic spinel phase with space group of Fd 3m), LiMnO 2 (orthorhombic phase with space group of Pmmn, o-LiMnO 2 or monoclinic phase with space group of C2/m, m-LiMnO 2 ) and Li 2 MnO 3 (monoclinic phase with space group of C2/m) are promising candidates for the cathode materials in LIBs. LiMn 2 O 4 is composed of three-dimensional frameworks of Mn 2 O 4 , conducive to the intercalation and deintercalation of Li ions. In the Li x Mn 2 O 4 cathode, lithium ions are reversibly intercalated into and deintercalated out of the host spinel phase in two composition ranges of 0 x 1 and 1 x 2, which produce two voltage plateaus at 4 V and 3 V, respectively [5]. The plateau at 1 x 2 is related to the JahnTeller distortion with a large volume change of the cathode, which leads to capacity drop of the battery. Thus, the plateau at 0 x 1 is of more interest. In the case of LiMnO 2 , m-LiMnO 2 can be synthesized by exchanging ions of Li and Na from the NaMnO 2 structure [6]. When synthesized under equilibrium conditions, o-LiMnO 2 always forms [7]. In o-LiMnO 2 , oxygen ions are arranged in nearly cubic-close-packing, and the octahedral interstices are occupied by Li and Mn forming corrugated layers [8]. o-LiMnO 2 transforms into the spinel structure during electrochemical cycling, which is an irreversible transformation [9]. Li 2 MnO 3 has an O3-type structure and can also be described as a layered phase when the for- mula is written as Li [Li 1/3 Mn 2/3 ]O 2 . The interslab octahedral sites are occupied only by Li ions and the slab octahedral sites are occupied by Thin Solid Films 528 (2013) 217223 Corresponding author. E-mail address: julian.scher@kit.edu (J. Fischer). 0040-6090/$ see front matter © 2012 Elsevier B.V. All rights reserved. http://dx.doi.org/10.1016/j.tsf.2012.08.058 Contents lists available at SciVerse ScienceDirect Thin Solid Films journal homepage: www.elsevier.com/locate/tsf