Two-dimensional fluid approach to the dc magnetron discharge This article has been downloaded from IOPscience. Please scroll down to see the full text article. 2005 Plasma Sources Sci. Technol. 14 168 (http://iopscience.iop.org/0963-0252/14/1/018) Download details: IP Address: 193.137.16.114 The article was downloaded on 26/03/2012 at 18:48 Please note that terms and conditions apply. View the table of contents for this issue, or go to the journal homepage for more Home Search Collections Journals About Contact us My IOPscience