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Recently, in the design of submillimeter and farinfrared wavelength (30
1000 "m) focal plane array, a combination of a large field of view and a high
spatial resolution becomes more important for astronomical observations in
order to carry them out more effectively. This requirement leads to
development of larger format 2dimensional (2D) array detectors. Many
researchers so far have made many efforts to realize such large format 2D
array detectors based on not only conventional photoconductors and
semiconductor bolometers
14
, but also high sensitive superconducting