Patterning, electroplating and removal of SU-8 moulds by excimer laser micromachining This article has been downloaded from IOPscience. Please scroll down to see the full text article. 2001 J. Micromech. Microeng. 11 133 (http://iopscience.iop.org/0960-1317/11/2/308) Download details: IP Address: 35.46.3.136 The article was downloaded on 16/07/2012 at 20:11 Please note that terms and conditions apply. View the table of contents for this issue, or go to the journal homepage for more Home Search Collections Journals About Contact us My IOPscience