Fabrication of combined-scale nano- and microfluidic polymer systems using a multilevel dry etching, electroplating and molding process This article has been downloaded from IOPscience. Please scroll down to see the full text article. 2012 J. Micromech. Microeng. 22 115008 (http://iopscience.iop.org/0960-1317/22/11/115008) Download details: IP Address: 192.38.90.11 The article was downloaded on 26/09/2012 at 14:55 Please note that terms and conditions apply. View the table of contents for this issue, or go to the journal homepage for more Home Search Collections Journals About Contact us My IOPscience