Different modes of electron heating in dual-frequency capacitively coupled radio frequency discharges This article has been downloaded from IOPscience. Please scroll down to see the full text article. 2009 Plasma Sources Sci. Technol. 18 034011 (http://iopscience.iop.org/0963-0252/18/3/034011) Download details: IP Address: 148.6.27.70 The article was downloaded on 26/07/2010 at 10:12 Please note that terms and conditions apply. View the table of contents for this issue, or go to the journal homepage for more Home Search Collections Journals About Contact us My IOPscience