ISSN 1063-7826, Semiconductors, 2008, Vol. 42, No. 7, pp. 852–857. © Pleiades Publishing, Ltd., 2008.
Original Russian Text © T.E. Slobodyan, K.A. Bulashevich, S.Yu. Karpov, 2008, published in Fizika i Tekhnika Poluprovodnikov, 2008, Vol. 42, No. 7, pp. 871–877.
852
1. INTRODUCTION
In the first part of this study (see [1]), we derived
wave equations for the waveguide modes that have TE
and TM polarization and propagate in optically uniaxial
laser heterostructures formed on the basis of nitrides of
Group III elements; we also formulated the necessary
boundary conditions for components of the electromag-
netic field [1]. As a result of the analysis of experimen-
tal data on optical properties of both nitrides of Group
III elements and the substrate materials (sapphire, GaN,
and SiC), we obtained approximations for spectral
dependences of permittivities for the ordinary and
extraordinary waves. In the second part of our study
(this publication), these results are used to gain insight
into specific features of optical confinement in typical
nitride laser heterostructures and the effect of materials
of the substrate and metallic p-type electrode deposited
on the laser-diode surface on this confinement.
2. OPTICAL CONFINEMENT IN LASER
HETEROSTRUCTURES
In this section, we consider the waveguide proper-
ties of typical laser heterostructures described in avail-
able publications. Since (as will be seen from what fol-
lows) the substrate plays an important role in the forma-
tion of an optical waveguide, the structures on the
substrates of GaN, sapphire, and SiC are considered
separately.
2.1. A Laser Structure on the GaN Substrate
A laser heterostructure grown on the homoepitaxial
GaN substrate was described by Skierbiszewski et al.
[2]. This structure consists of a buffer GaN:Si layer
with the thickness of 2.2 μm, an Al
0.08
Ga
0.92
N:Si emit-
ter with a thickness of 550 nm, a lower GaN:Si
waveguide layer with a thickness of 100 nm, a transi-
tion In
0.01
Ga
0.99
N:Si layer with a thickness of 40 nm,
and an active region consisting of five undoped 4-nm-
thick In
0.09
Ga
0.91
N quantum wells (QWs) separated by
7-nm-thick In
0.01
Ga
0.99
N:Si barriers. The blocking
14-nm-thick In
0.01
Al
0.16
Ga
0.83
N:Mg layer is located
between the active region and the 70-nm-thick upper
waveguide In
0.01
Ga
0.99
N:Mg layer; then follows the
p-type emitter represented by a short-period super-
lattice (SL) consisting of 80 pairs of
In
0.01
Ga
0.99
N/In
0.01
Al
0.16
Ga
0.83
N layers (with the thick-
ness 2.5/2.5 nm) doped uniformly with Mg (the total
thickness of the emitter is 400 nm). The 100-nm-thick
GaN:Mg contact layer was grown on top of the p-type
emitter. The level of doping of n-type layers with
donors was 5 × 10
18
cm
–3
, while the hole concentration
measured in some p-In
0.01
Ga
0.99
N layers was 2 ×
10
18
cm
–3
. The experimental lasing wavelength for such
structure was 408 nm. Since the period of the
In
0.01
Ga
0.99
N/In
0.01
Al
0.16
Ga
0.83
N SL is much shorter
than the wavelength of stimulated light, in order to sim-
plify the analysis of waveguide properties of this het-
erostructure, we replaced the short-period SL by a layer
Optical Confinement in Laser Diodes Based on Nitrides
of Group III Elements. Part 2: Analysis of Heterostructures
on Various Substrates
T. E. Slobodyan
a
, K. A. Bulashevich
a, b
, and S. Yu. Karpov
b
^
a
Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 194021 Russia
b
Soft-Impact Ltd., P.O. Box 83, St. Petersburg, 194156 Russia
^e-mail: karpov@softimpact.ru
Submitted November 12, 2007; accepted for publication November 13, 2007
Abstract—Numerical simulation is used to systematically analyze the waveguide properties of laser hetero-
structures based on nitrides of Group III elements and formed on substrates made of various materials (sapphire,
silicon carbide, and gallium nitride); in the analysis, the birefringence effect both in the nitride structure itself
and in the substrate was taken into account. The specific features of optical confinement in typical laser struc-
tures and the effect of the substrate material and metallic contacts formed on top of the p-type layers are considered.
The coefficients of optical losses for waveguide modes due to free charge carriers and to leakage into the substrate
were estimated; these estimates were used to determine the significance of various channels of losses.
PACS numbers: 78.66.Fd, 42.55.Px, 42.82.Et, 42.55.Lc
DOI: 10.1134/S1063782608070166
PHYSICS OF SEMICONDUCTOR
DEVICES