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© 2007 Wiley Periodicals, Inc.
A CPW LINEAR RESONATOR METHOD
FOR THE MICROWAVE
CHARACTERIZATION OF HIGH
DIELECTRIC CONSTANT FILMS
Luciene S. Demenicis,
1
Rodolfo A. A. Lima,
2
Luiz Fernando M. Conrado,
2
Walter Margulis,
3
and
Maria Cristina R. Carvalho
2
1
Instituto Militar de Engenharia (IME), Rio de Janeiro, Brazil
2
Centro de Estudos em Telecomunicac ¸o ˜ es, Pontifı ´cia Universidade
Cato ´ lica do Rio de Janeiro (PUC-Rio), Rua Marque ˆ s de Sa ˜ o Vicente,
225–22453-900 Rio de Janeiro, Brazil
3
ACREO, Stockholm, Sweden
Received 28 July 2006
ABSTRACT: A coplanar waveguide linear resonator technique for the
experimental characterization of the dielectric properties of films in the
microwave frequency range at room temperature is proposed. The ap-
proach is simple to implement as it consists of a film with unknown high
dielectric constant deposited over the resonator, printed on standard
alumina substrate using conventional photolithography process. The
technique is illustrated by the measurement of the dielectric constant
and losses of various ceramic screen-printed thick films: BaTiO
3
(BTO),
CaCu
3
Ti
4
O
12
(CCTO), and a BTO(x)–CCTO(1 - x) composite with differ-
ent concentrations (x = 0.2, 0.5, and 0.8). © 2007 Wiley Periodicals, Inc.
Microwave Opt Technol Lett 49: 521–524, 2007; Published online in
Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.
22176
Key words: very high dielectric constant; coplanar waveguide; micro-
wave resonator; thick film
1. INTRODUCTION
The increasing demand for broadband and mobile wireless com-
munication systems has created a strong motivation for small-size
microwave component development. For these applications, the
use of ceramic substrates with very high dielectric constant be-
comes attractive. The wavelength corresponding to a particular
frequency is significantly reduced in these materials, allowing the
construction of smaller packaged devices without deteriorating the
electrical performance [1, 2]. Progress in this area will rely upon
the identification of new microwave dielectric materials with en-
hanced quality.
High dielectric constant ceramic films have been widely inves-
tigated for use in small-sized microwave planar circuits [3]. Thin
film capacitors, phase shifters for phased array antennas, filters,
resonators, and impedance transformers are some successful ex-
amples of this promising technology [4 – 8]. Recently, an uncon-
ventional multilayered CPW structure obtained by deposition of
high dielectric constant thin films over the conductors printed on
conventional bulk substrates has been proposed [9]. Using this
pattern, the lines have both simple cross-sections and very com-
fortable transversal dimensions, leading to cheaper manufacture.
However, the dielectric properties of the films at microwave fre-
quencies must be carefully controlled for such applications. The
material of choice for the film in this configuration must present
high dielectric constant and low-loss tangent in this frequency
range.
Materials such as Ta
2
O
3
, SrTiO
3
(STO), and BaSrTiO
3
(BST)
have been investigated for this purpose because of their high
dielectric constant in bulk form. However, their properties in film
formation are very sensitive to fabrication method [10]. Besides
depending on many variables associated to the manufacture pro-
cess, the dielectric properties are also strongly dependent on the
operation frequency range, and temperature. Thus, the accurate
design of high-frequency devices requires the development of RF
characterization techniques, capable of measuring dielectric con-
stant and loss tangent of the related films at microwave frequen-
cies.
Recently, some techniques to measure the electrical properties
of bulk substrates using transmission line resonators in T [11] and
ring [12] configurations have been proposed. These approaches
could also be extended to the characterization of dielectric films.
In this article, a coplanar waveguide linear resonator technique
for the experimental characterization of the dielectric constant and
losses of films in the microwave frequency range is proposed. It
consists of a film with unknown high dielectric constant deposited
over a CPW linear resonator printed on standard alumina substrate.
The resulting effective dielectric constant of the structure takes
into account the contribution of both dielectrics and the geometry
of the resonator. Comparison between experimental and theoretical
results of transmission characteristics of the resonator with fre-
quency allows the determination of the dielectric properties of the
film. The technique presented and described herein is useful for the
measurement of dielectric properties for both thick and thin films.
It allows the measurement of the material dielectric characteristics
as a film applied to the microwave structure in the same frequency
range and temperature of the operation conditions.
Using this technique, the dielectric constant and losses in
microwave frequencies were investigated for the following ce-
ramic screen-printed thick films: BaTiO
3
(BTO), CaCu
3
Ti
4
O
12
(CCTO), and a composite BTO–CCTO material.
2. TECHNIQUE DESCRIPTION
The CPW-film configuration proposed in this work is depicted in
Figure 1. It consists of a film with very high relative dielectric
constant (
r2
) deposited over a CPW linear resonator printed on
alumina substrate (
r1
). The length of the central strip inner section
determines the resonant frequency.
The technique is based on the resonance properties of a half-
wavelength long CPW resonator. The structure resonates when its
length is an integer multiple of half a guide wavelength. The
fundamental and higher-order resonance of a series of loosely
Figure 1 Perspective view of the CPW linear resonator covered with
thick film
DOI 10.1002/mop MICROWAVE AND OPTICAL TECHNOLOGY LETTERS / Vol. 49, No. 3, March 2007 521