Sensors and Actuators B 221 (2015) 104–112
Contents lists available at ScienceDirect
Sensors and Actuators B: Chemical
jo u r nal homep age: www.elsevier.com/locate/snb
Facile integration of ordered nanowires in functional devices
Jordi Guilera
a
, Cristian Fàbrega
a,b
, Olga Casals
b
, Francisco Hernández-Ramírez
a,b
,
Shuangzhou Wang
c
, Sanjay Mathur
c
, Florian Udrea
d,e
, Andrea De Luca
d
, S. Zeeshan Ali
e
,
Albert Romano-Rodríguez
b
, J. Daniel Prades
b,∗
, Joan R. Morante
a,b
a
IREC, Catalonia Institute for Energy Research, San Adrià de Besòs, Spain
b
Departament d’Electrònica and Institute of Nanoscience and Nanotechnology (IN
2
UB), Universitat de Barcelona, Barcelona, Spain
c
Institute of Inorganic Chemistry, University of Cologne, Cologne, Germany
d
Engineering Department University of Cambridge, Cambridge, United Kingdom
e
Cambridge CMOS Sensors Ltd, Cambridge, United Kingdom
a r t i c l e i n f o
Article history:
Received 24 April 2015
Received in revised form 4 June 2015
Accepted 6 June 2015
Available online 25 June 2015
Keywords:
Nanowire
Nanofabrication
Devices
Electrodes
Dielectrophoresis
Gas sensor
Photodetector
Field-effect device
Low cost integration
a b s t r a c t
The integration of one-dimensional (1D) nanostructures of non-industry-standard semiconductors in
functional devices following bottom-up approaches is still an open challenge that hampers the exploita-
tion of all their potential. Here, we present a simple approach to integrate metal oxide nanowires in
electronic devices based on controlled dielectrophoretic positioning together with proof of concept
devices that corroborate their functionality. The method is flexible enough to manipulate nanowires
of different sizes and compositions exclusively using macroscopic solution-based techniques in conven-
tional electrode designs. Our results show that fully functional devices, which display all the advantages
of single-nanowire gas sensors, photodetectors, and even field-effect transistors, are thus obtained right
after a direct assembly step without subsequent metallization processing. This paves the way to low
cost, high throughput manufacturing of general-purpose electronic devices based on non-conventional
and high quality 1D nanostructures driving up many options for high performance and new low energy
consumption devices.
© 2015 Elsevier B.V. All rights reserved.
1. Introduction
One-dimensional (1D) nanostructures offer a convenient path
for the synthesis of high-quality, almost defect free, crystals of non-
industry-standard semiconductor materials, such as metal oxides
(MOX) [1,2]. However, the integration of these materials in func-
tional devices, with the necessary degree of order and complexity, is
an open challenge that still hampers the exploitation of their poten-
tial in full [2,3]. Current bottom-up approaches rely on a complex
combination of positioning methods (e.g. nanomanipulation, self-
assembly, di/electrophoresis, etc.) [3–5], and connecting methods
(e.g. UV, electron/ion beam, soft lithographies) [6–8]. This strat-
egy is however far from reconciling technical requisites with cost
requirements of the industry.
A decade of research efforts shows that the most advanta-
geous nanodevice configuration requires either a single (or a few)
nanowires running parallel between two electrodes [9] to thus
∗
Corresponding authors. Tel.: +34 934039159.
E-mail address: dprades@el.ub.edu (J.D. Prades).
build up a well-defined conduction channel to be easily modulated
by external stimuli (e.g. chemical or biological agents [10,11], light
or radiation [12], external electric fields [13,14], etc.). This means
explicitly avoiding random wire-to-wire conduction paths which
inevitably appear in devices based on randomly oriented mats of
1D nanostructures [15].
In the particular case of metal oxide nanowire-devices, this con-
figuration has successfully led to a high number of applications
and proof-of-concept prototypes, proving their interest in high
temperature and power electronics, in which highly miniaturized
field-effect transistors of wide-band gap semiconductor are sought
after [16–18].
On the one hand, and regarding gas detection applications,
nanowire-based metal oxide sensors [19,20] display important
advantages only accessible in ordered configurations [15]. Firstly,
the large surface-to-volume ratio of nano-sized materials provides
a systematic way to increase the influence of surface phenomena,
such as the response to gases [21]. Secondly, nanowires are typically
enclosed by well-terminated surfaces in well-defined crystal orien-
tations, offering a reduced set of interaction sites with gases that
render better reaction control, and in general good signal stability
http://dx.doi.org/10.1016/j.snb.2015.06.069
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