Proceedings of the 10 th INDIACom; INDIACom-2016; IEEE Conference ID: 37465 2016 3 rd International Conference on “Computing for Sustainable Global Development”, 16 th - 18 th March, 2016 Bharati Vidyapeeth's Institute of Computer Applications and Management (BVICAM), New Delhi (INDIA) Performance Evaluation of the Multi-slotted Micro-machined Patch Antenna Rajat Arora Guru Nanak Dev University, Regional Campus Gurdaspur, Punjab- 143521, INDIA Email ID: rajat.arora5924@gmail.com Shashi B Rana Guru Nanak Dev University, Regional Campus Gurdaspur, Punjab- 143521, INDIA Email ID: shashi_rana12@yahoo.co.in Sandeep Arya Department of Physics & Electronics, University of Jammu, J&K- 180006, INDIA Email ID: snp09arya@gmail.com Saleem Khan Department of Physics & Electronics, University of Jammu J&K- 180006, INDIA Email ID: saleem.k21@gmail.com Abstract – This paper highlights the various performance characteristics of multislotted patch antenna which is fabricated by using micro-machining technique. A 2 inch n-type silicon wafer, with high resistivity (>1000 ohm-cm) is used as a substrate material. The patch is designed on the substrate by using thin gold film with dimensions 340×240×2 μm3. In order to obtain multiband operation twelve thin slots of the dimensions 20×5×2 μm3 were etched from the gold substrate. The resultant structure obtained resembles like the shape of horn antenna which is capable of achieving multiband operations. The fabricated antenna results are measured for different performance parameters like VSWR, return loss, radiation patterns and compared with simulation results of high-frequency structure simulator tool HFSS. The experimental and simulated results are found to be almost identical. The impedance bandwidth obtained is about 49 Ω for |S11| ≤ −10 dB ranging from 2.5 to 30 GHz. This antenna is capable of achieving peak gain of 7 dBi. Keywords – multi-slotted antenna; microstrip patch; micro- machined; silicon substrate, lithography . I. INTRODUCTION The antenna, being an integral part of Wireless Communication devices, defines the performance of these devices. These devices include cellular mobile phones, tablets, laptop, AM and FM radios, radio-frequency identification system (RFID), satellite navigational (GPS) system devices etc. [1]. The concept of the Microstrip antenna was first given by the Deschamps in 1953 [2-3]. However, the practical antennas were developed by Munson and Howell in the 1970s [4]. Microstrip or patch antenna is a low profile antenna consisting of radiating patch on one side of a dielectric substrate and ground plane on its other side [5-6]. For good antenna performance, a thick dielectric substrate having a low dielectric constant is desirable since this provides better efficiency, larger bandwidth and better radiation [7-9]. To improve the gain and bandwidth requirement, the various shapes of patches are used that can be square, rectangular, circular, dipole, triangular, elliptical etc. The value of L for the fundamental TM 10 mode excitation is slightly lesser than , where Ȝ is the dielectric medium wavelength, is free-space wavelength, and is the effective dielectric constant of a microstrip line of width W [10-12]. The value of is slightly less than the dielectric constant of the substrate because the fringing fields from the patch to the ground plane are not confined in the dielectric only, but are also spread in the air [13]. For designing this antenna at high frequencies, planar transmission line feed network is used [14-15]. Most commonly the Patch antennas are fabricated on low dielectric constant ( 10 ) and thick substrates to obtain good radiation efficiency and larger impedance bandwidth [16]. silicon substrates possess two factors that confines the performance They are (i) excitation of surface waves that result in narrow bandwidth, poor radiation efficiency and degraded radiation patterns, and (ii) losses caused by silicon conductivity [17-18]. In this paper High Resistivity Silicon (HRS) substrate is used, where the losses due to the substrate conductivity are minimized thereby, improving the antenna radiation efficiency. The proposed horn shaped multi slot microstrip patch antenna like other multi- frequency antennas are capable of achieving the multiband operation with small cross-polarization level within each frequency band and hence have broader tuning range. TABLE I. PARAMETER AND DIMENSION OF MICROSTRIP SLOT ANTENNA Dimensions Value Length of the substrate, L 40 mm Width of the substrate, W 40 mm Length of the Patch, LP 32 mm Width of the Patch, WP 24 mm Height of the substrate, h 270 ȝm Spacing between Slots 1 mm Length of Feed Line LFL 16 mm Width of Feed Line WFL 1.8 mm Slot length, Lm 2 mm Slot width, Wm 0.5 mm Copy Right © INDIACom-2016; ISSN 0973-7529; ISBN 978-93-80544-20-5 1148