This content has been downloaded from IOPscience. Please scroll down to see the full text. Download details: IP Address: 202.6.242.69 This content was downloaded on 09/03/2014 at 10:13 Please note that terms and conditions apply. Scanning grating based in-plane movement sensing View the table of contents for this issue, or go to the journal homepage for more 2010 J. Micromech. Microeng. 20 085007 (http://iopscience.iop.org/0960-1317/20/8/085007) Home Search Collections Journals About Contact us My IOPscience