Tib1e 1. sIEM Defonnalde I\linoi pecificatioi> for 30 Meter Telescope .A() Svstem Actiiati (oUiit 4. III to ii I.UOU 64x01 and 1 (((xl 00) Actuatoi pacin ( lcai Apertui Dianietel 40) miLl ons II) mill to 4t nun tmoke Range >10 uiicmon urfaee Differential Stroke (iieihboriii actuators) >1 imcion Bandwidth >2501) Hz )-Sdh (To to accuracy 10 urn )ueratmne Temperature - 1) cleoreec ( Actuatom Yield 990.0 (MC'AU. M( )A( ) 10000 Dnet inn cci Initial Performance Results for High-Aspect Ratio Gold MEMS Deformable Mirrors Bautista Fernández and Joel Kubby Department of Electrical Engineering University of California, Santa Cruz 1156 High Street, MS:SOE2 Santa Cruz, CA 95064 ABSTRACT The fabrication and initial performance results of high-aspect ratio 3-dimensional Micro-Electro- Mechanical System (MEMS) Deformable Mirrors (DM) for Adaptive Optics (AO) will be discussed. The DM systems were fabricated out of gold, and consist of actuators bonded to a continuous face sheet, with different boundary conditions. DM mirror displacements vs. voltage have been measured with a white light interferometer and the corresponding results compared to Finite Element Analysis (FEA) simulations. Interferometer scans of a DM have shown that ~9.4um of stroke can be achieved with low voltage, thus showing that this fabrication process holds promise in the manufacturing of future MEMS DM’s for the next generation of extremely large telescopes. Keywords: Adaptive Optics, High-Aspect Ratio MEMS, Large-Stroke Deformable MEMS Mirrors Introduction Future astronomical telescopes will require the use of large-stroke deformable mirrors. Current MEMS DM technology has not yet met the requirements. Table 1 contains the MEMS DM specifications for the TMT AO system. The devices described in this paper are a step closer to achieving the ~10μm of stroke as required by the Thirty Meter Telescope (TMT). Unlike current MEMS DM’s that are limited in their stroke by the thin (microns) sacrificial layers in the low-aspect ratio surface micromachining fabrication process, the devices described in this paper have been fabricated with a high-aspect ratio LIGA process that allows thick (tens to hundreds of microns) material layers, and thus larger-stroke DM’s to be fabricated. Table 1. MEMS DM specifications for TMT AO System 1 MEMS Adaptive Optics III, edited by Scot S. Olivier, Thomas G. Bifano, Joel A. Kubby, Proc. of SPIE Vol. 7209, 72090O · © 2009 SPIE · CCC code: 0277-786X/09/$18 · doi: 10.1117/12.809617 Proc. of SPIE Vol. 7209 72090O-1 Downloaded From: http://proceedings.spiedigitallibrary.org/ on 07/31/2013 Terms of Use: http://spiedl.org/terms