This content has been downloaded from IOPscience. Please scroll down to see the full text. Download details: This content was downloaded by: adamjmm IP Address: 109.171.129.97 This content was downloaded on 31/08/2016 at 15:01 Please note that terms and conditions apply. Mass and position determination in MEMS mass sensors: a theoretical and an experimental investigation View the table of contents for this issue, or go to the journal homepage for more 2016 J. Micromech. Microeng. 26 105009 (http://iopscience.iop.org/0960-1317/26/10/105009) Home Search Collections Journals About Contact us My IOPscience