Progress on the development of active micro-structured optical arrays for X-ray optics Daniel Rodriguez Sanmartin, ∗a Dou Zhang, a Tim Button, a Carolyn Atkins, b Peter Doel, b Hongchang Wang, h David Brooks, b Charlotte Feldman, c Richard Willingale, c Alan Michette, d Slawka Pfauntsch, d Shahin Sahraei, d Matthew Shand, d Ady James, e Camelia Dunare, f Tom Stevenson, f William Parkes, f and Andy Smith g a University of Birmingham, School of Metallurgy and Materials, Edgbaston, Birmingham, B15 2TT, U.K. b University College London, Department of Physics and Astronomy, Gower Street, London WC1E 6BT, U.K. c University of Leicester, Department of Physics and Astronomy, Leicester, LE1 7RH, U.K. d King’s College London, Department of Physics, Strand, London WC2R 2LS, U.K. e Mullard Space Science Laboratory, University College London, Holmbury St. Mary, Dorking, Surrey, RH5 6NT, U.K. f Scottish Microelectronics Centre, University of Edinburgh, The King’s Buildings, West Mains Road, Edinburgh EH9 3JF, U.K. g STFC - Daresbury Laboratory, Keckwick Lane, Warrington, Cheshire, WA4 4AD, U.K. h Diamond Light Source Ltd., Harwell Science and Innovation Campus, Didcot, OX11 0DE, U.K. ABSTRACT The Smart X-Ray Optics (SXO) project comprises a U.K.-based consortium developing active/adaptive micro-structured optical arrays (MOAs). These devices are designed to focus X-rays using grazing incidence reflection through consecutive aligned arrays of microscopic channels etched in silicon. The silicon channels have been produced both by dry and wet etching, the latter providing smoother channel walls. Adaptability is achieved using piezoelectric actuators, which bend the device and therefore change its focal distance. We aim to achieve a 5 cm radius of curvature which can provide a suitable focal length using a tandem pair MOA configuration. Finite Element Analysis (FEA) modelling has been carried out for the optimization of the MOA device design, consider different types of actuators (unimorph, bimorph and active fibre composites), and different Si/piezoelectric absolute and relative thicknesses. Prototype devices have been manufactured using a Viscous Plastic Processing Process for the piezoelectric actuators and dry etched silicon channels, bonded together using a low shrinkage adhesive. Characterisation techniques have been developed in order to evaluate the device performance in terms of the bending of the MOA channels produced by the actuators. This paper evaluates the progress to date on the actuation of the MOAs, comparing FEA modelling with the results obtained for different prototype structures. Keywords: Smart X-ray Optics, Micro-structured optical arrays, Piezoelectric actuators, PZT, Finite Element Analysis. 1 INTRODUCTION The idea of micro-structured optical arrays (MOAs) was discussed at a SPIE meeting in 2001 (3) and at the international X-ray Microscopy conference in Grenoble in 2002; (4) some progress followed (5, 6) but it was limited by lack of funding until the UK Smart X-Ray Optics (SXO) (7) consortium received funds initially for a pilot study (in 2004) and then for a ∗ dxr493@bham.ac.uk; phone: +44 121 414 3443; fax: +44 121 414 3441/7639; http://www.irc.bham.ac.uk/powder/fmg/. In addition to the institutions of the authors, the lead institution of SXO is University College of London (UCL), Department of Physics and Astronomy (A. Peter Doel). The programme is managed by the Mullard Space Science Laboratory (Ady James), part of UCL. Silson Ltd. (Peter Anastasi) is an associate member, as are Diamond Light Source Ltd (Kawal Sawhney). Advances in X-Ray/EUV Optics and Components IV, edited by Ali M. Khounsary, Christian Morawe, Shunji Goto, Proc. of SPIE Vol. 7448, 744808 · © 2009 SPIE · CCC code: 0277-786X/09/$18 · doi: 10.1117/12.826096 Proc. of SPIE Vol. 7448 744808-1