Subscriber access provided by EMPA DUBENDORF ACS Nano is published by the American Chemical Society. 1155 Sixteenth Street N.W., Washington, DC 20036 Articles A New Route to the Production and Nanoscale Patterning of Highly Smooth, Ultrathin Zirconium Oxide Films Scott M. D. Watson, Karl S. Coleman, and Amit K. Chakraborty ACS Nano, 2008, 2 (4), 643-650 • DOI: 10.1021/nn700138q • Publication Date (Web): 04 April 2008 Downloaded from http://pubs.acs.org on December 11, 2008 More About This Article Additional resources and features associated with this article are available within the HTML version: • Supporting Information • Access to high resolution figures • Links to articles and content related to this article • Copyright permission to reproduce figures and/or text from this article