Purdue University Purdue e-Pubs Birck and NCN Publications Birck Nanotechnology Center 6-21-2011 Silicon Nanowire Tunneling Field-Effect Transistor Arrays: Improving Subthreshold Performance Using Excimer Laser Annealing Joshua Thomas Smith Purdue University, jtsmith@purdue.edu Christian Sandow Peter Gruenberg Institut 9 (PGI-9-IT), sandow@netdust.de Saptarshi Das Purdue University, sdas@purdue.edu Renato A. Minamisawa Peter Gruenberg Institut 9 (PGI-9-IT), r.a.minamisawa@fz-juelich.de Siegfried Mantl Peter Gruenberg Institut 9 (PGI-9-IT), s.mantl@fz-juelich.de See next page for additional authors This document has been made available through Purdue e-Pubs, a service of the Purdue University Libraries. Please contact epubs@purdue.edu for additional information. Smith, Joshua Thomas; Sandow, Christian; Das, Saptarshi; Minamisawa, Renato A.; Mantl, Siegfried; and Appenzeller, Joerg, "Silicon Nanowire Tunneling Field-Effect Transistor Arrays: Improving Subthreshold Performance Using Excimer Laser Annealing" (2011). Birck and NCN Publications. Paper 711. http://docs.lib.purdue.edu/nanopub/711