See discussions, stats, and author profiles for this publication at: https://www.researchgate.net/publication/248270391 Optical and electrical properties of indium tin oxide thin films sputter-deposited in working gas containing hydrogen... Article in Materials Letters ยท March 2009 DOI: 10.1016/j.matlet.2008.12.008 CITATIONS 12 READS 20 6 authors, including: Shigemi Kohiki National Institute for Materials Science 191 PUBLICATIONS 2,199 CITATIONS SEE PROFILE All content following this page was uploaded by Shigemi Kohiki on 22 March 2015. The user has requested enhancement of the downloaded file. All in-text references underlined in blue are linked to publications on ResearchGate, letting you access and read them immediately.