See discussions, stats, and author profiles for this publication at: https://www.researchgate.net/publication/4151500 Fabrication and modeling of 3-D self-assembled SOI MEMS controlled by thermal and plastic strains Conference Paper in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · January 2005 DOI: 10.1109/MEMSYS.2005.1453966 · Source: IEEE Xplore CITATIONS 5 READS 17 5 authors, including: Some of the authors of this publication are also working on these related projects: CMOS devices on top of trap-rich high resistivity SOI substrates View project Nicolas André Université Catholique de Louvain 50 PUBLICATIONS 292 CITATIONS SEE PROFILE Thomas Pardoen Université Catholique de Louvain 270 PUBLICATIONS 5,135 CITATIONS SEE PROFILE Jean-Pierre Raskin Université Catholique de Louvain 566 PUBLICATIONS 4,685 CITATIONS SEE PROFILE All content following this page was uploaded by Nicolas André on 21 February 2015. The user has requested enhancement of the downloaded file. All in-text references underlined in blue are linked to publications on ResearchGate, letting you access and read them immediately.