See discussions, stats, and author profiles for this publication at: https://www.researchgate.net/publication/261117716 Modeling the sensing behavior of a MEMS field ionization device coupled with capacitive actuation Conference Paper · October 2012 DOI: 10.1109/ICSENS.2012.6411421 CITATIONS 0 READS 27 2 authors, including: Some of the authors of this publication are also working on these related projects: BIOBACTIL View project Thomas Walewyns Université Catholique de Louvain 11 PUBLICATIONS 20 CITATIONS SEE PROFILE All content following this page was uploaded by Thomas Walewyns on 18 June 2014. The user has requested enhancement of the downloaded file. All in-text references underlined in blue are linked to publications on ResearchGate, letting you access and read them immediately.