See discussions, stats, and author profiles for this publication at: https://www.researchgate.net/publication/47537442 Optimization of ion energy spread in inductively coupled plasma source designed for focused ion beam applications Article in Vacuum · April 2013 DOI: 10.1016/j.vacuum.2010.07.008 · Source: OAI CITATIONS 6 READS 98 5 authors, including: Some of the authors of this publication are also working on these related projects: ECR ion source, Permanent magnet sextupole design, Superconducting magnets View project Plasma sources, Ion sources and Applications View project P. Y. Nabhiraj Variable Energy Cyclotron Centre 56 PUBLICATIONS 42 CITATIONS SEE PROFILE Ranjini Menon Variable Energy Cyclotron Centre 22 PUBLICATIONS 22 CITATIONS SEE PROFILE Ratan - Bhandari Tribhuvan University 159 PUBLICATIONS 361 CITATIONS SEE PROFILE All content following this page was uploaded by P. Y. Nabhiraj on 12 August 2014. The user has requested enhancement of the downloaded file.