See discussions, stats, and author profiles for this publication at: https://www.researchgate.net/publication/224102795 Three-dimensional silicon integration Article in Ibm Journal of Research and Development · December 2008 DOI: 10.1147/JRD.2008.5388564 · Source: IEEE Xplore CITATIONS 223 READS 307 16 authors, including: Some of the authors of this publication are also working on these related projects: Micro-Systems Technology & Solutions; Healthcare & Life Sciences View project Patent Application, IBM View project R.J. Polastre IBM 45 PUBLICATIONS 1,585 CITATIONS SEE PROFILE Sri Sri-Jayantha IBM 36 PUBLICATIONS 697 CITATIONS SEE PROFILE Anna Topol IBM 62 PUBLICATIONS 1,223 CITATIONS SEE PROFILE Cornelia K. Tsang IBM 57 PUBLICATIONS 1,737 CITATIONS SEE PROFILE All content following this page was uploaded by R.J. Polastre on 20 January 2017. The user has requested enhancement of the downloaded file. All in-text references underlined in blue are added to the original document and are linked to publications on ResearchGate, letting you access and read them immediately.