This journal is © The Royal Society of Chemistry 2016 J. Mater. Chem. C
Cite this: DOI: 10.1039/c6tc03607d
Resistive switching characteristics of
all-solution-based Ag/TiO
2
/Mo-doped In
2
O
3
devices for non-volatile memory applications†
Sujaya Kumar Vishwanath and Jihoon Kim*
In this paper, we demonstrate the fabrication of electrochemical-metallization-based resistive switching
random access memory (ECM-based ReRAM) devices with an Ag/TiO
2
/Mo-doped In
2
O
3
configuration
through a simple solution-based process. Both TiO
2
and Mo-doped In
2
O
3
layers in the memory device
were spin-coated with polymer-assisted-solution inks formulated by coordinating the Ti-, Mo-, and In-
complex with a water-soluble polymer. The Ag top electrode was inkjet-printed with Ag nanoparticle
ink. The memory devices fabricated by all-solution processes demonstrated excellent bipolar switching
behavior with a high resistive switching ratio of 10
3
, an excellent endurance of more than 1000 cycles, a
stable retention time greater than 10
4
s at elevated temperatures, and a fast programming speed of
250 ns. The characterization results of the conduction mechanism in high and low resistive states
indicate that the resistive switching is caused by the formation and rupture of nano-sized Ag conducting
filaments in the TiO
2
layer. These results suggest the potential of all-solution-based ECM-based ReRAM
for developing future nonvolatile memory devices at low cost.
Introduction
The new environment of future electronics requires higher
computing power and higher energy efficiency. Thus, there is an
emerging demand for new memory devices with better endurance,
faster programming speed, and lower power consumption.
1–9
The
scalability issues of modern floating-gate-based flash memory
devices emerge as a major concern to achieve these goals in the
semiconductor industry, due to the technical limit of floating gates
when managing electrons in further scaled-down devices.
In order to address these challenges, alternative nonvolatile
memory architectures have been investigated such as devices
based on ferroelectric polarization (FRAM: ferroelectric random
access memory), magnetic polarization (MRAM: magnetic random
access memory) and material phase change (PRAM: phase-
change random access memory). However, these new memory
concepts still suffer from miniaturization and power consumption
issues.
10,11
Under these circumstances, another nonvolatile
memory concept based on resistive switching by external
electrical stimulation (ReRAM: resistive-switching random access
memory) has attracted significant attention. These devices present
high scalability with a simple cross-bar memory structure
(4F
2
/n compaction where F and n are the minimal feature size
and the number of vertical stacking layers, respectively), high
switching speed (o10 ns), high endurance (410
7
cycles), good
retention time (410 years at 85 1C), and low power consump-
tion (B1 mW).
5,9,12,13
ReRAM devices consist of a simple capacitor-like structure,
with an insulating layer in between two conducting electrodes.
The origin of resistive switching in ReRAMs is usually attributed
to the formation and rupture processes of nano-size conducting
filaments (CFs) in the insulating layer, leading to low (SET) and
high (RESET) resistive states in the ReRAM structure. The choice
of electrode materials plays a key role in forming CFs in the
insulating layer. With the asymmetric combination of an electro-
chemically active electrode (Ag or Cu) and an electrochemically
inert electrode (Pt, Au, W, etc.), CFs are formed by the electro-
chemical dissolution and ionic migration of the electrochemically
active materials, triggered by a sufficient bias voltage with proper
polarity. The ReRAM operated by this specific mechanism
is called electrochemical-metallization (ECM) memory. Many
different types of materials, such as perovskites, chalcogenides
and metal oxides, have been explored to be applied as insulating
layers.
14–23
Recently, binary transition metal oxides such as TiO
2
,
Cu
2
O, NiO, Ta
2
O
5
, Al
2
O
3
and Nb
2
O
5
have been extensively
investigated due to their simple composition and thermal stability.
However, in most cases, the insulating layer and the conducting
electrodes are deposited using vacuum-based processes including
Division of Advanced Materials Engineering, Kongju National University,
Cheoan-daero, Seobuk-gu, Cheonan, Chunganm, 31080, Korea.
E-mail: Jihoon.Kim@kongju.ac.kr
† Electronic supplementary information (ESI) available. See DOI: 10.1039/
c6tc03607d
Received 21st August 2016,
Accepted 30th October 2016
DOI: 10.1039/c6tc03607d
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