IOP PUBLISHING JOURNAL OF PHYSICS D: APPLIED PHYSICS
J. Phys. D: Appl. Phys. 42 (2009) 142003 (5pp) doi:10.1088/0022-3727/42/14/142003
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Measurement of the electron density in
atmospheric-pressure low-temperature
argon discharges by line-ratio method of
optical emission spectroscopy
X M Zhu
1
, Y K Pu
1
, N Balcon
2,3
and R Boswell
2
1
Department of Engineering Physics, Tsinghua University, Beijing 100084, People’s Republic of China
2
Research School of Physical Sciences and Engineering, Australian National University, Canberra 0200,
Australia
3
CPAT, Universit´ e Paul Sabatier, Toulouse 31000, France
E-mail: puyikang@tsinghua.edu.cn
Received 20 May 2009, in final form 9 June 2009
Published 26 June 2009
Online at stacks.iop.org/JPhysD/42/142003
Abstract
A new collisional–radiative model for atmospheric-pressure low-temperature argon discharges
is proposed, which illustrates the significant effect of electron density on the excited atom
population distribution. This makes it possible to determine the electron density from the
intensity ratio of emission lines of excited atoms. Results of this new method in several types
of atmospheric-pressure discharges are found to be in agreement with those of the Stark
broadening method and the electric model over a wide electron density range 10
11
–10
16
cm
-3
.
(Some figures in this article are in colour only in the electronic version)
The electron density is one of the most fundamental
parameters in gas discharges and plays a very important
role in understanding the discharge physics and optimization
of the operation of plasmas [1, 2]. Typical methods to
measure the electron density include the use of a Langmuir
probe [3], microwave interferometery [4], laser Thomson
scattering (LTS) [5] and optical emission spectroscopy (OES)
[6]. However, in atmospheric-pressure low-temperature
discharges, both the probe and the microwave-based methods
are difficult to use due to the small plasma dimensions
and strong collisional processes. LTS has been proved
to be effective but challenging because of the low signal
and excessive stray light, as well as the complicated
experimental setup [7]. However, the OES-based technique
has the advantages of being non-intrusive, inexpensive and
convenient. There are three major OES techniques to
determine the electron density in low-temperature plasmas.
One OES method involves the investigation of the Stark
broadening of emission line profiles, such as that of hydrogen
Balmer lines [8]. At electron densities lower than ∼10
13
cm
-3
and at atmospheric pressure, this method is inappropriate
since the van der Waals broadening or Doppler broadening
becomes the dominant broadening process. Another method
is to analyse the continuum radiation if it is observed, such
as in some recombining plasmas [9]. The last one is the line-
ratio method, in which the intensity ratio of emission lines
is related to the electron density by a collisional–radiative
model (CRM) [10]. This method has been successfully used
in low- and medium-pressure discharges [10–12]. In this
work, with a CRM of atmospheric-pressure discharges, a
line-ratio method to determine the electron density from the
mostly observed optical emission of argon 2p–1s transitions
(in Paschen’s notation) is introduced.
To obtain the relationship between the electron density
and the line-ratios of optical emissions, the effect of electron
density on the excited atom kinetics should be analysed. In
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