* Corresponding author e-mail: bharat_bvm@yahoo.co.in Journal access: www.ijesft.com Tel.: +91 9824745445 © 2015 A D Publication. All rights reserved ID:IJESFT2016V02I0154412 Volume 02 Issue 01, January 2016 International Journal of Engineering Science and Futuristic Technology A Peer-reviewed journal ISSN : 2454-1338(O), ISSN : 2454-1125(P) IJESFT 13 (2016) 001-009 Review of techniques for MEMS device processing B N Prajapati 1 * , A D Patel 2 1,2 Mechanical Engineering Department, Government Polytechnic Palanpur, Gujarat, India A B S T R A C T : Article History Available online: 13/01/2016 Micro-electromechanical systems, or MEMS is a process technology used to create tiny integrated devices or systems that combine mechanical and electrical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from a few micrometers to millimetres. These devices (or systems) have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale. The interdisciplinary nature of MEMS utilizes design, engineering and manufacturing expertise from a wide and diverse range of technical areas including integrated circuit fabrication technology, mechanical engineering, materials science, electrical engineering, chemistry and chemical engineering, as well as fluid engineering, optics, instrumentation and packaging. MEMS can be found in systems ranging across automotive, medical, electronic, communication and defence applications. Current MEMS devices include accelerometers for airbag sensors, inkjet printer heads, computer disk drive read/write heads, projection display chips, blood pressure sensors, optical switches, microvalves, biosensors and many other products that are all manufactured and shipped in high commercial volumes. © 2015 A D Publication. All rights reserved Keywords: electromechanical, MEMS, Micro machining, Micro fabrication, integrated circuit 1. Introduction Micro-electromechanical systems (MEMS) are a process technology used to create tiny integrated devices or systems that combine mechanical and electrical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from a few micrometers to millimetres. These devices (or systems) have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale.MEMS devices are very small; their components are usually microscopic. Levers, gears, pistons, as well as motors and even steam engines have all been fabricated by MEMS. However, MEMS is not just about the miniaturization of mechanical components or making things out of silicon (in fact, the term MEMS is actually misleading as many micro machined devices are not mechanical in any sense). MEMS is a manufacturing technology; a paradigm for designing and creating complex mechanical devices and systems as well as their integrated electronics using batch fabrication techniques. MEMS has several distinct advantages as a manufacturing technology. In the first place, the interdisciplinary nature of MEMS technology and its micromachining techniques, as well as its diversity of applications has resulted in an unprecedented range of devices and synergies across previously unrelated fields (for example biology and microelectronics). Secondly, MEMS with its batch fabrication techniques enables components and