Computer simulation of sputtering and oxygen desorption processes at grazing ion bombardment of Ag(1 1 0) surface A.A. Dzhurakhalov a, * , S.E. Rahmatov a , N.A. Teshabaeva a , H. Dreysse b a Arifov Institute of Electronics, F. Khodjaev Str. 33, 700187 Tashkent, Uzbekistan b IPCMS-GEMME, 23 rue du Loess, F-67037 Strasbourg Cedex, France Abstract The ion sputtering and oxygen desorption processes at 5 keV Ne ion bombardment of clean and O 2 covered Ag(1 1 0) surface have been investigated by computer simulation. The trajectories of the colliding particles were constructed as a sequence of binary collisions. The influence of surface potential barrier on the non-dissociative desorption yield has been studied and it was observed that the basic part of ion-impact desorbed particles overcomes a potential barrier. The sputtering yield of Ag atoms and the non-dissociative O 2 desorption yield versus the azimuth angle of incidence at grazing ion bombardment have been presented. It was shown that these dependencies correlate the orientation of crystal. At grazing ion bombardment the particles are ejected on azimuth angle mainly along the normal of plane of incidence. Ó 2002 Elsevier Science B.V. All rights reserved. Keywords: Computer simulation; Sputtering; Ion-impact desorption; Grazing ion bombardment 1. Introduction Ion sputtering processes on the surface of single crystals have been investigated very well when angle of ion bombardment is large [1,2]. In the case of grazing angles of incidence the information about ion sputtering processes is not enough [3,4]. Many researchers exhibit concern about so-called ion-impact desorption processes of the adsorbed particles, i.e. to an immediate knocking-out of adsorbed particles caused by incident ions [5–11]. In Onsgaard et al. [5] and Taglauer et al. [6,7] the ion-impact desorption processes of the adsorbed particles on metal surfaces has been studied by low-energy ion scattering. In Kapur and Garrison [8], OÕConnor et al. [9] and Dzhurakhalov et al. [10], the process of ion-impact desorption has been investigated immediate detection of the desorbed particles (basically, an atomic adsorption of these particles). The results of investigation of the ion- impact desorption are valuable not only for study of desorption process as effective method of Computational Materials Science 27 (2003) 117–122 www.elsevier.com/locate/commatsci * Corresponding author. Tel.: +998-71-162-7331; fax: +998- 71-162-8767. E-mail address: dzhurakhalov@mail.ru (A.A. Dzhurakha- lov). 0927-0256/03/$ - see front matter Ó 2002 Elsevier Science B.V. All rights reserved. doi:10.1016/S0927-0256(02)00434-2