Developing an AFM-Based SECM System; Instrumental Setup, SECM Simulation, Characterization, and Calibration A. Davoodi, a,c, * ,z A. Farzadi, b J. Pan, a, ** C. Leygraf, a, ** and Y. Zhu d a Division of Corrosion Science, Department of Chemistry, and b Department of Mechanics, School of Engineering Sciences, Royal Institute of Technology, SE-100 44 Stockholm, Sweden c Department of Materials Engineering, Tarbiat Moallem University of Sabzevar, 397, Sabzevar, Khorasan, Iran d Windsor Scientific Limited, Slough, SL1 4HE, United Kingdom An integrated atomic force microscopy/scanning electrochemical microscopy AFM/SECMsystem was developed as an in situ local electrochemical probing technique. It consists of a dual-mode probe acting as an AFM cantilever and SECM microelectrode to simultaneously obtain the topography and electrochemical current map of the same area. Two types of probes with different geometries were used. The scan velocity and concentration profile of the redox mediator during the scan were simulated, using the equations of convection–diffusion mass transport coupled with continuity and momentum in three dimensions under steady-state and transient conditions. The temporal and spatial resolutions of the probes were investigated. It was found that, during a normal scan rate around 1 Hz, the effect of convective transport is negligible and the SECM lateral resolution depends on the geometri- cal parameters. With favorable geometry, a probe with a Pt microelectrode of 1 m diameter can distinguish two active sites with a distance of at least 3–4 m. The paper also reports experiments for characterization and calibration of the AFM/SECM system. Concurrent AFM and SECM images obtained on a gold band calibration sample verify the high-resolution capability of the SECM of one or a few micrometers with optimized conditions. © 2008 The Electrochemical Society. DOI: 10.1149/1.2943324All rights reserved. Manuscript submitted December 18, 2007; revised manuscript received May 19, 2008. Available electronically June 24, 2008. In recent years, both atomic force microscopy AFMand scan- ning electrochemical microscopy SECMhave been applied to in- vestigate localized electrochemical events such as biosensor, cata- lytic activity, localized corrosion, etc. 1-23 AFM gives high-resolution topographic information, and is able to precisely control the distance between the sample and the probe, whereas SECM can provide de- tailed information of local electrochemical activities due to anodic and cathodic processes. SECM results can give valuable information on chemical and electrochemical changes above and around local active sites which can indirectly be an indication of local activity variation related to local surface activities due to its heterogeneous microstructure. Despite many successful applications, the spatial resolution of SECM is lower than that of scanning probe microscopy-based techniques such as AFM. 13 Therefore, a low lat- eral resolution of SECM current imaging was a crucial issue. How- ever, usually AFM lacks chemical specificity. Attempts were made to solve the problem in different ways. Great efforts were made to improve the spatial resolution of SECM by using AFM distance control capability, which permits high-resolution data acquisition. Different approaches have been reported for producing a bifunc- tional probe acting simultaneously as an AFM tip and SECM micro- electrode. Macpherson et al. reported the integration of an SECM/ AFM probe achieved by using a photolithography method. 13,14 In this case, an oxide sharpened silicon nitride Si 3 N 4 AFM tip was used and the gold-coated AFM cantilever was insulated with photo- resist coating. Illuminating with an optical micropattern generator opened the end point of the AFM tip for the SECM signal. This type of probe was also used in dynamic force microscopy with magnetic field excitation to recognize the enzymatic activities of a glucose biosensor. 24 Moreover, the SECM/AFM Si 3 N 4 cantilever was com- bined with integrated pyramidal tips. 18,19 The underside of the probe was sputter coated with Cr and Pt to provide conducting AFM tips capable of functioning as electrodes, as well as force sensors. The electrochemical and electrical properties of dimensionally stable Ti /TiO 2 /Pt electrodes have been investigated using this type of probe. 18,19 In another approach, a combined SECM/AFM probe was fabri- cated by a coating flattened and etched Pt microwire with electro- phoretically deposited paint for insulation. 14-16 The steps involved in the fabrication of SECM-AFM tips were iconstructing a Pt micro- wire electrode, iietching the Pt to a small point, iiifabricating the cantilever component of the SECM-AFM tip by compression, ivinsulating the electrode and cantilever by electrodeposition of a paint, which retracts from the tip end during heat curing to expose a small Pt electrode, and vfixating the probe to the AFM holder using epoxy resin. 16-19 Meanwhile, Kranz et al. presented an ap- proach to fabricate a microelectrode integrated in a standard AFM tip. 20-22 The sequences of fabrication were imetal Cr and Au coating of the Si 3 N 4 cantilever by sputtering, iiinsulating with a silicon nitride layerof the metal-coated AFM cantilever by plasma- enhanced chemical vapor deposition, and iiifocused ion beam FIBcutting of the modified AFM cantilever. Simultaneous contact mode imaging of a micropatterned sample with immobilized en- zyme spots and imaging of enzyme activity was obtained using this type of probe. 22 More recently, by using nanofabrication facilities including several ionic and chemical etching steps of Si wafer and following low-pressure chemical vapor deposition of silicon nitride Si 3 N 4 and Pt, a platinum silicide Pt x Si x tip was produced for a bifunctional AFM/SECM probe. 23 Moreover, taking advantage of metal masking technology and FIB, a precise exposure of Pt-coated silicon nitride AFM tip could be achieved to fabricate an array of SECM/AFM probes. 25 To determine the benefits of integrated SECM/AFM measure- ments, various numerical simulation methods have been employed for the SECM part. 26-33 The simulation of SECM could assist in the analysis of the influence of different electrochemical and geometri- cal parameters on the experimental performance, such as the reso- lution. For instance, to estimate and improve the resolution of SECM, one can use simulations to study the influence of geometri- cal parameters. Because the fabrication of bifunctional AFM/SECM probes still is a challenging and expensive process, simulation could also help to evaluate the performance and improve the probe design. An adaptive finite element algorithm was used for simulation of arbitrarily shaped SECM tips in two dimensions. 26,27 Steady-state and transient amperometric SECM responses were simulated in three dimensions with the boundary element method BEM. 28,30-33 The SECM amperometric experiments with a heptode microelec- trode a Pt core microelectrode surrounded by quartz glass and six microelectrodes at premieras a local probe were quantitatively ana- lyzed by means of three-dimensional 3Dnumerical simulations * Electrochemical Society Student Member. ** Electrochemical Society Active Member. z E-mail: adavoodi@kth.se Journal of The Electrochemical Society, 155 8C474-C485 2008 0013-4651/2008/1558/C474/12/$23.00 © The Electrochemical Society C474 Downloaded 01 Sep 2008 to 130.237.66.134. Redistribution subject to ECS license or copyright; see http://www.ecsdl.org/terms_use.jsp