Abstract—Parasitic series resistances and mobility degradation are limiting the development of advanced MOSFETs. We review, scrutinize, and critically compare five parameter extraction methods that use DC data measured from a single test device. The use of a single device facilitates individual characterization and avoids the impact of device-to-device model parameter variation that affects other common methods that require using measurements from arrays of transistors with several different geometries. Index Terms— MOSFET, parameter extraction, Mobility degradation, Parasitic series resistance. I. INTRODUCTION HE presence of source-and-drain series resistance and mobility degradation in MOSFETs produce similar effects on their drain current-gate voltage ID(VGS) transfer characteristics. Various specialized books and review articles have explained and analyzed this topic [1-10], and several procedures have been proposed and reported to extract the values of the parameters that correspond to these two effects in MOSFET compact models [11-35]. We recently published a novel method that allows extracting the total series resistance and the mobility degradation of a single test device from DC measurements [34]. We have also described and critically reviewed several of the diverse methods that exist for extracting the values of these two important model parameters for MOSFET functional description [4,10]. We will examine here five methods for extracting the values of the series resistance and the mobility degradation parameters of MOSFET models that use drain current-gate voltage ID(VGS) transfer characteristics and drain current-drain A. Ortiz-Conde, F. J. García-Sánchez, and A. Sucre-González are with the Solid State Electronics Laboratory at Universidad Simón Bolívar, Caracas, Venezuela (ortizc@ieee.org; fgarcia@ieee.org; andresucre88@gmail.com). R. S. Murphy-Arteaga, R. Torres-Torres, and Fabián Zárate-Rincón are with the Electronics Department at the Instituto Nacional de Astrofísica, Óptica y Electrónica (INAOE), Tonantzintla, Puebla 72840, México (rmurphy@inaoep.mx ; reydezel@inaoep.mx; fabian_zar@hotmail.com ). Juin J. Liou is with EMOAT, LLC, 1933 Ayrshier Place., Oviedo, FL 32765, USA ( juin.liou@hotmail.com ). 978-1-5386-1962-9/17/$31.00 ©2017 IEEE voltage ID(VDS) output characteristics measured from a single test device. II. PARAMETER EXTRACTION METHODS The above-threshold drain current of MOSFETs operating in the so-called triode region may be essentially modeled in general by a simple equation of the form [22]: 2 ds D eff ox gs T ds eff V W = C V V V I L μ - - , (1) where W is the channel width, Leff is the effective channel length, μeff is the Vgs-dependent effective mobility, COX is the gate dielectric capacitance, VT is the threshold voltage, and the device’s intrinsic gate-to-source, Vgs, and drain-to-source, Vds, voltages are related to their external counterparts by: 2 gs GS D R V V I = - , (2) ds DS D V V RI = - , (3) where VGS is the externally applied gate voltage, VDS is the externally applied drain voltage, R is the total source-and- drain series resistance. In writing (2) and (3), the drain and source resistances are assumed equal (R/2). Possible asymmetry between the drain and the source, giving rise to different values of drain and source resistances, can be an important aspect to consider in modern devices and it has been recently studied in [10]. The Vgs-dependent degradation of the effective mobility is frequently modeled by an expression of the form [36]: ( ) ( ) 2 1 2 1 o eff gs T gs T = V V V V μ μ θ θ + - + - (4) where μo is the low-field mobility, θ1 and θ2 are the first and second order gate field (Vgs) mobility degradation factors. A commonly used first order (θ2=0) simplified version of (4) is: ( ) 1 1 o eff gs T = V V μ μ θ + - . (5) Substitution of (4) into (1) yields: ( ) ( ) ( ) 2 1 2 2 1 ds o gs T ds D gs T gs T V K V V V = I V V V V θ θ - - + - + - , (6) On the extraction methods for MOSFET series resistance and mobility degradation using a single test device Adelmo Ortiz-Conde, Senior Member, IEEE, Andrea Sucre-González, Fabián Zárate-Rincón, Reydezel Torres-Torres, Senior Member, IEEE, Roberto S. Murphy-Arteaga, Senior Member, IEEE, Juin J. Liou, Fellow Member, IEEE, and Francisco J. García-Sánchez, Senior Member, IEEE T 2017 International Caribbean Conference on Devices, Circuits and Systems (ICCDCS) 15