Calibration of the scales of areal surface topography-measuring instruments: part 1. Measurement noise and residual flatness This article has been downloaded from IOPscience. Please scroll down to see the full text article. 2012 Meas. Sci. Technol. 23 035008 (http://iopscience.iop.org/0957-0233/23/3/035008) Download details: IP Address: 139.143.5.160 The article was downloaded on 24/04/2012 at 07:29 Please note that terms and conditions apply. View the table of contents for this issue, or go to the journal homepage for more Home Search Collections Journals About Contact us My IOPscience