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ELSEVIER Surface and Coatings Technology 93 (1997) 305-308
Characterization of Ti-6A1-4V modified by nitrogen plasma immersion
ion implantation
F. Alonso a,., M. Rinner b, A. Loinaz a, J.I. Ofiate a, W. Ensinger b B. Rauschenbach b
~'INASMET, Camino de Pormetxe, 12, 20009 San Sebastidn, spain
b Universitdt Augsburg, Institutfiir Physik, 86135 Augsburg, Germany
Abstract
2 --
Ti-6A1-4V alloy is commonly used in biomedical or aerospace applications, due to its excellent combination of chemical and
mechanical properties, such as bioinertness, corrosion resistance or nigh strength to weight ratio. The use of surface treatments
or coatings has widened the application possibilities of this alloy. The often observed poor tribological performance can be
overcome by the correct choice of surface engineering methods. Ion implantation is a candidate among the different available
processes and excellent results have been obtained in biomedical applications. However, when complex geometries are involved,
it can be a difficult and less economically effective treatment. Plasma immersion ion implantation (PIII) offers the possibility of
performing three-dimensional ion beam treatments, reducing the need for manipulation under vacuum to obtain a uniform
treatment of geometrically complex parts.
In this work, PIII was used to implant nitrogen in the Ti-6A1-4V alloy. The nitrogen plasma was generated with a 2.45 GI-Iz
microwave excitation, and a pulsed bias voltage of 45 kV with pulse repetition rates of 50 and 400 Hz were applied. Nitrogen
retained doses were evaluated by means of Rutherford backscattering spectroscopy (RBS). Pin-on-disc wear and friction tests
were performed on the implanted samples. An ultra high molecular weight polyethylene pin was used as the counterface material
to partially simulate the conditions encountered in biomedical applications. A reasonable improvement in load bearing capacity
with respect to the unimplanted alloy was observed after these tribological tests. However, no hardening could be measured after
ion implantation. The worn surfaces were observed by scanning electron microscopy and optical profilometry after the tests and
the type of wear mechanism was studied. The effect of the implantation was to increase the load at which breakthrough occurred
on the protective surface layer. © 1997 Elsevier Science S.A.
Keywords: Friction; Load bearing capacity; Plasma immersion ion implantation; Ti-6A14V; Wear
1. Introduction
Plasma immersion ion implantation (PIII) is an alter-
native ion implantation technique which overcomes
some of the limitations of ion beam implantation [1-3].
Contrary to ion beam implantation, PIII is not a line-
of-sight process and therefore allows the treatment of
complex shape components with an acceptable dose
uniformity [4]. However, recent studies have demon-
strated a dependence of the implanted dose on the
geometry of the substrate, with differences of up to 50%
in the retained doses measured in sharp edges and flat
surfaces [5]. There are new facilities that allow accelera-
tion voltages of 100 kV [6,7]; however, PIII treatments
are normally carried out at a maximum acceleration
* Corresponding author. Tel.: +34-(9)43-21 80 22;
+ 34-(9)43-21 75 60; e-maiI:patonso@inasmet.es
fax:
0257-8972/97/$17.00© 1997ElsevierScienceS.A. All rights reserved.
PII S0257-8972(97) 00065-0
voltage of 50 kV [8-10]. Moreover, when using nitrogen
as the source gas, the plasma is formed by a mixture of
N~- and N ÷ ions, with a N~- estimated percentage
>75% [6, 11], which results in a decrease of the energy
of implanted nitrogenatoms. However, despite the fact
that these voltages are lower than in conventional ion
beam implantation, where they can be up to 200 kV,
PIII provides the potential to achieve deeper penetration.
For nitrogen PIII, two mechanisms have been reported
to account for the increase in depth: radiation enhanced
diffusion [12, 13] and thermal diffusion, as PIII treatment
can be performed at temperatures up to 500-600°C
[8,141.
Ti-6AI-4V is an alloy that has been successfully
treated with the PIII process, earlier on. Chen and
co-workers [8] showed that an increase in hardness and
wear resistance was produced after nitrogen implant-
ation; with selected treatment conditions the wear resis-