See discussions, stats, and author profiles for this publication at: https://www.researchgate.net/publication/231039875 Black silicon method X: A review on high speed and selective plasma etching of silicon with profile control: An in-depth comparison between Bosch and cryostat DRIE processes as a r... Article in Journal of Micromechanics and Microengineering · February 2009 DOI: 10.1088/0960-1317/19/3/033001 CITATIONS 155 READS 597 5 authors, including: Some of the authors of this publication are also working on these related projects: PhD Project H. Tilmans View project U-Needle View project H.V. Jansen Technical University of Denmark 159 PUBLICATIONS 4,556 CITATIONS SEE PROFILE M.J. De Boer University of Twente 130 PUBLICATIONS 3,155 CITATIONS SEE PROFILE M. C. Elwenspoek University of Twente 604 PUBLICATIONS 12,263 CITATIONS SEE PROFILE All content following this page was uploaded by H.V. Jansen on 19 May 2014. The user has requested enhancement of the downloaded file.