The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences ( TAS2006) November 5-9, 2006, Tokyo, Japan 4-9903269-0-3-C3043 © 2006 Society for Chemistry and Micro-Nano Systems 179 SOLVENT-RESISTANT AND TRANSPARENT POLYSILAZANE GLASS MICROFLUIDICS FOR PHOTOCHEMICAL REACTIONS Hong-Joo Lee, Amit Asthana, Jayakumar Perumal, Jun-Hong Park, Dong-Pyo Kim* School of Applied Chemistry and Biological Engineering, Chungnam National University, Daejeon 305-764, Korea, E-Mail: dpkim@cnu.ac.kr Abstract The microfabrication of ceramic material having thermal, chemical, and tribological stability is an inevitable demand for the devices in the fields of microfluidics. The study describes the preparation of micro/nano-sized patterns and microfluidic channels using soft lithographic technique from the UV and thermally cured preceramic polymer for the applicable potentials of the photochemical reaction. Keywords: Soft lithography, Microfluidics, Polysilazane glass 1. Introduction Soft lithography with elastomeric polydimethylsiloxane (PDMS) mold has been significantly facilitated for the micropattern transfer and fabrication of microfluidics in simple and efficient manners [1]. Among soft lithographic techniques, it is known that the imprint lithography makes it possible fabricate micro- or nanopatterns at high resolution, high throughput and low cost and can be applied to the fabrication of various shapes such as curved surfaces [2]. The preceramic polymer is heat-treated or pyrolyzed at ~1000 o C to convert it to a monolithic ceramic part for the useful potential of non-oxide ceramic MEMS (Microelectromechanical Systems). However, the polymer undergoes linear shrinkage of about 30 % during the heat treatment. Also, adhesion to a substrate during this stage can cause cracking or fracture as well as reduction of density [3]. It is suggested that the conversion of preceramic polymers into the cured polymers can be used for microfabrication because of low shrinkage compared with ceramic materials. As far as we know, the microfabrication of the cured polymer is rarely reported. In our present study, we have successfully fabricated the polysilazane glass microfluidics with high optical transparency, thermal stability and chemical inertness via simple fabrication process using a commercially available preceramic polymer. Also, it was clearly shown that the fabrication of microchannels using the cured inorganic polymers holds tremendous potentials in the field of photochemical reaction.