ORIGINAL PAPER Microelectrode array fabricated in low temperature cofired ceramic (LTCC) technology Patrycja Ciosek & Konrad Zawadzki & Dorota Stadnik & Pawel Bembnowicz & Leszek Golonka & Wojciech Wróblewski Received: 28 February 2008 / Revised: 21 April 2008 / Accepted: 23 April 2008 / Published online: 18 June 2008 # Springer-Verlag 2008 Abstract This work presents the development of a novel construction of an integrated microelectrode array. The device was fabricated on a ceramic support, with the use of low temperature cofired ceramics technology. Model potassium-selective membranes were applied on the surface of PdAg/AgCl electrodes formed on the ceramic substrate. The obtained microsensors exhibited very good repeatability, reproducibility, and sensitivity. The array of microelectrodes covered with polymeric layers of various selectivities was applied as an electronic tongue to differentiate between various diet supplements. Keywords Electronic tongue . Microelectrode array . LTCC technology Introduction Multisensor devices offer a wide possibility of advanced analytical applications. The fusion of various measurement techniques allows to improve the amount of the information gained in a single act of measurement. In the case of electronic noses and tongues, the combination of sensors based on different transducers provides better characteriza- tion of a sample—the chemical image of the sample becomes more complete because wider spectrum of properties is studied [1, 2]. Integration of sensors on a single support can be employed not only in devices mimicking chemical senses [3–6] but also in systems realizing classical analytical procedures. In the case when one kind of sensors is integrated on the same substrate, the accuracy of the measurement can be improved or high density discrete sensing can be performed [6]. When many sensors, selective towards various species, are fabricated on a single platform, the system can be applied in multicomponent analysis [6–11]. Fabrication technology of integrated multisensor devices that can perform several modes of measurement (i.e., electronic nose/tongue, measurements with improved accu- racy, and multicomponent determinations) should be care- fully chosen. The main feature of that technology should be the possibility of easy formation of transducer structure and spreading of the chemosensitive material on its surface. The device material should be chemically inert and the cost the preparation of the final structure should be relatively low. Moreover, the possibility of scaling down the device would be also advantageous, because it allows to obtain mini- aturized total analysis systems [12, 13]. In some cases, the J Solid State Electrochem (2009) 13:129–135 DOI 10.1007/s10008-008-0571-x P. Ciosek (*) : K. Zawadzki : W. Wróblewski Department of Analytical Chemistry, Warsaw University of Technology, Noakowskiego 3, 00-664 Warsaw, Poland e-mail: pciosek@ch.pw.edu.pl URL: http://csrg.ch.pw.edu.pl D. Stadnik Department of Chemical Analysis, Institute of Biotechnology and Antibiotics, Staroscinska 5, 02-516 Warsaw, Poland P. Bembnowicz : L. Golonka Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wybrzeze Wyspianskiego 27, 50-370 Wroclaw, Poland