Surface metrology This article has been downloaded from IOPscience. Please scroll down to see the full text article. 1997 Meas. Sci. Technol. 8 955 (http://iopscience.iop.org/0957-0233/8/9/002) Download details: IP Address: 129.5.32.121 The article was downloaded on 13/09/2013 at 14:20 Please note that terms and conditions apply. View the table of contents for this issue, or go to the journal homepage for more Home Search Collections Journals About Contact us My IOPscience