Hyperfine Interactions 41 (1988) 717-720 717 A MOSSBAUER INVESTIGATION OF THE AMORPHOUS TIN-ANTIMONY OXIDE FILMS* H. TANG, R. LIU and ~ HSIA Depanment of Physics, Nanjing Unive~ity, Na~m~ China CHEN, C. NIU and X. FU Department of Chem~try, Nanjing University, Na~m~ China The Tin-Antimony oxide fil~s Snl_xSbxO2(x=0.00-0.66) with thickness about 1100~ have been prepared on glass substrates by CVD and studied by using CEMS and XRD. The broad line widths of Ivl~ssbauer spectra and of X-ray diffraction patterns indicate a distri- bution of the hyperfine parameters due to the distor- tion of the rutile lattice. A distribution fitting program has been used to evaluate the distribution of quadrupole splitting QS and of isomer shift IS in the samples studied. 1. Introduction Because of their high conductivity, transparency, chemical and thermal stability, SnO 2 films have been used as semiconducting mater- ials and producting commercially for many years. It is well known that the electrical conductivity of SnO 2 film can be controlled by adding Sb203. Therefore,it is interesting to study the correlation between Sb contents and the properties of Snl_xSbxO2 films. 2. Experiment and results The Snl_xSbxO2 films deposited on pyrex glass substrates were prepared by CVD at 450"-480"C, with thickness around 1100~ as measured by alpha-step 200 Tencor instrument. The Snl_xSbxO 2 films (x=0.00, 0.09, 0.66) were investigated by X-ray diffractometer of the model XD-3A using Cu K~ radiation with a nickel filter. The results are shown in Fig. 1. The CEMS measurements were performed with a 10 mCi Bal19snO3 source using a He/CH 4 filled proportional detector. A typical result is shown in Fig. 2. Calibration of the Doppler velocity was carried out with a 57Co/Rh source and a standard iron foil. The isomer shift values are referred to SnO 2. The spectrum of the sample with different compositions is composed of a broadened asymmetric peak, apparently which is formed by the overlapping of a series of spectral lines resulted from dis- tribution of different environments around tin ions in the sample. A program with Gaussian distribution of quadrupole splitting P(QS) has * The project supported by National natural Science foundation of China. 9 J.C. Baltzer A.G., Scientific Publishing Company