Regular Paper 646 J. KIEEME Vol. 25, No. 8, pp. 646-650, August 2012 DOI: http://dx.doi.org/10.4313/JKEM.2012.25.8.646 온도 가스 감지 다기능성 세라믹 복합 센서 문희규 1,2 , 심영석 1 , 김도홍 1 , 류정호 4 , 김진상 1 , 박형호 2 , 박동수 4 , 윤석진 1,a , 장호원 1,3,b 1 한국학기술연구원 전자재료연구센터 2 연세대학교 신소재학 3 서울대학교 재료학 4 한국기연구원 부설 재료연구소 기능세라믹연구실 Temperature and Gas Sensing Multifunctional Ceramic Sensors Hi Gyu Moon 1,2 , Young-Seok Shim 1 , Do Hong Kim 1 , Jung ho Ryu 4 , Jin-Sang Kim 1 , Hyung-Ho Park 2 , Dong-Soo Park 4 , Seok-Jin Yoon 1,a , and Ho Won Jang 3,b 1 Korea Institute of Science and Technology, Electronic Materials Research Center, Seoul 136-791, Korea 2 Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea 3 Department of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea 4 Korea Institute of Materials Science, Functional Ceramics Research Group, Changwon 641-010, Korea (Received July 3, 2012; Revised July 20, 2012; Accepted July 24, 2012) Abstract: Multifunctional structures with two kinds of materials have been intensively investigated in order to improve their electrical characteristic with two functions simultaneously. However, the research regarding of multifunctional ceramic sensor is still in a preliminary stage and how to integrate them with low-cost and high-yield mass production process remains a challenge issue. In this study, we fabricated the multifunctional ceramic sensor composed of temperature and gas sensors. Moreover, we investigated the CO sensing properties of three dimensional nanostuctured Nb2O5 thin film gas sensors fabricated with silica (SiO2) nanosphere (Ø= 750 nm). Compared to plain films, the nanostructured films show enhanced gas sensing of greater sensitivity and a faster response. This result reveals that significantly increased sensitivity is an increase in the effective surface area for the adsorption of gas molecules. Keywords: Multifunctional sensors, Complex ceramic sensor, Nb2O5 gas sensors, NiMn2O4, Nanostructure 1. 서 론 복합 센서와 련된 분야는 매년 급히 성장하여 유비쿼터스 및 환, 생체 시스템 등 다양한 사업 분 야의 활성화와 용효를 크 증가시켜 왔다 [1,2]. a. Corresponding author; sjyoon@kist.re.kr b. Corresponding author; hwjang@snu.ac.kr 이런 분야의 전자기기는 초소형화, 환친화, 다기능 그리 성능화를 지향하는 방향으로 발전하 될 으로 전망되어 각종 전자기기의 부품은 환 친화 적인 세라믹 소재를 기반으로 대체될 이다 [2-4]. TiO2, SnO2, WO3, ZnO, Nb2O5와 은 세라믹 소재는 재료특성상 매우 한 합력을 가져 높은 온안정 성, 내구성이 있으며 친환적이다 [5]. 또한 소재를 에피 박막형태로 성장시키나 구조를 다양한 재조