Research Article 1(1) 114-117 Advanced Materials Proceedings
Copyright © 2016 VBRI Press 114
High Dielectric Constant SiO
2
Nanoparticles
Sathosh K. Kurni, Pradip Paik
*
School of Engineering Sciences and Technology, University of Hyderabad, 500046, India
*
Corresponding author, E-mail: pradip.paik@gmail.com; Tel: (+91) 040-2313 4457
Received: 31 March 2016, Revised: 01 August 2016 and Accepted: 03 August 2016
DOI: 10.5185/amp.2016/120
www.vbripress.com/amp
Abstract
SiO
2
nanoparticles of average size 15-20 nm have been synthesized and its dielectric properties have been
investigated as a function of frequency (between 20 Hz to 2 MHz). A very high dielectric constant of ca. 14000 at 20
Hz and at room temperature has been observed which is very high compared to the conventional bulk SiO
2
particles
(ca. 50-100). For this new SiO
2
the loss value is found to be less than 1. These SiO
2
nanoparticles with high
dielectric constant and low loss can be offered its use in constructing high efficient electronic circuit boards and
storage devices. Spectra between real and imaginary parts of dielectric constant reveal an inclined line with
depressed semicircle. Impedance measurements have been performed to know the electrical properties of the novel
SiO
2
nanoparticles. XRD, TEM and FTIR characterizations confirm the solid state network structural,
morphological shape and size, and chemical functionality of SiO
2
respectively. Copyright © 2016 VBRI Press
Keywords: SiO
2
NPs, dielectric constant, dielectric loss, impedance, AC conductivity.
Introduction
Materials with high dielectric constant and low loss
have potential applications in electronic industry and
required new materials on current demands. SiO
2
nanoparticles (NPs) in various forms have wide
variety of applications in different fields like
electronics, bio imaging, drug delivery [1] and cancer
therapy [2] etc. SiO
2
NPs are used as coatings in
photovoltaic devices to reduce the reflectance [3].
Due to the development of Very Large Scale
Integration technology (VLSI), use of low dielectric
constant materials (low k) and high dielectric
constant materials became mandatory. SiO
2
films
can be used as low k material as well as high k
material in the form of interlayer dielectric in
transistors depending on its dielectric constant. Its
dielectric constant can be increased/decreased by
doping with carbon or fluorine and imparting
porosity to it [4-6].
The common high k materials being used in
electronic industry are SiO
2
, Hafnium silicate
(HfSiO
4
), and Zirconium silicate (ZrSiO
4
) [7].
Interlayer dielectric should be in the form of films by
requirement. Polymer dispersed with high k materials
also can be used for the same followed by composite
film formation [8]. The SiO
2
being used as gate oxide
material in transistors encounters problems like
leakage current and diffusion of metal layers and less
gate capacitance for its lesser thickness (less than
2nm) [9]. Therefore a high k material is required
which avoids such problems in the device. There has
been a search for new high k materials with fewer
inconveniences for the past decade. In this work a
new ultra-fine SiO
2
NPs has been synthesized and its
dielectric properties have been investigated as a
function of frequency and temperature. The present
material discussed in this article has very high
dielectric constant when compared to conventional
SiO
2
films (3.9) deposited through PECVD [10] and
which can be used for increase in the efficiencies of
the future generation electronic devices.
Experimental
Materials details
TEOS (99.9%, Sigma Aldrich), Ethanol (99.3%,
Merck) and NH
4
OH (99.9%, Sigma Aldrich) were
used in their pure form for synthesis.
Material synthesis
Synthesis of SiO
2
NPs: The synthesis of SiO
2
NPs
was done using sol-gel technique with a little
modification. The detailed procedure of the method is
as follows. Ethanol 30 ml was taken in a flask and 2
ml TEOS was added after 10 minutes under vigorous
stirring. After 10 minutes 1 ml water was added to
the reaction mixture. Stirring continued for 20
minutes then 3 ml NH
4
OH was added to it. Gel was
formed after few minutes and was dried in a furnace
at 80°C for overnight. A white powder of SiO
2
NPs
was obtained.
Characterizations
High resolution transmission electron microscopy
(HRTEM) (Model: FEI TECHNAI G2 200 kV S-
twin) was used to find out the shape, size and