II WORKSHOP ON CHEMICAL SENSORS AND BIOSENSORS 279 BIOLOGICAL AND ORGANIC MOLECULES PHOTOIONIZATION FOR BIOMOLECULAR DEVICE FABRICATION Piero Morales 1 , Luca Giulietti 1 , Lucia Mosiello 1 , Roberto Pilloton 1 ; Franco Bordoni 2 , Giovanni DeGasperis 2 , Stefano Sperandii 2 , Sandro Santucci 3 , Enzo DiFabrizio 4 1 ENEA, Centro della Casaccia; 2 Facolta' di Ingegneria, Universita' di L'Aquila; 3 Dipartimento di Fisica, Universita' di L'Aquila; 4 Istituto di Elettronica dello Stato Solido del CNR, Roma Abstract: This work aims to the development of a soft deposition technique for organic molecules and biological macromolecules, working in high vacuum rather than in solution so that environmental conditions compatible with the microelectronics fabrication processes can be achieved. Our technique is based on pulsed laser vaporization and ionization of the molecular species. Following ionization, electric fields can steer our material onto the substrate, and high resolution patterning can be achieved either by the insertion of removable masks obtained by e-beam lithography or by localized fields. The biological activity of the deposited species was proven, as well as the stability of our depositions. A characterization of surface smoothness and thickness of the deposit was effected. This technique was also applied to the deposition of photoionized metal atoms aiming to the fabrication of nanoscopic conductors. Keywords: laser deposition, biosensor, micro device