MnMn/O Interface Termination at the Co
2
Mn
α
Si/MgO Interface in Magnetic
Tunnel Junctions Investigated by Scanning Transmission Electron Microscopy
Fengyuan Shi,
1
Hongxi Liu,
2
Masafumi Yamamoto
2
and Paul M. Voyles
1
1.
Materials Science and Engineering Department, University of Wisconsin-Madison, Madison, WI,
53706, US
2.
Division of Electronics for Informatics, Hokkaido University, Sapporo 060-0814, Japan
We have discovered MnMn/O and CoCo/O interface terminations at the MgO/Co
2
MnSi (CMS)
interfaces in CoFe/MgO/Co
2
Mn
α
Si (α = 0.80, 1.0 and 1.29) magnetic tunnel junctions (MTJs) from
high-resolution STEM images. The existence of MnMn/O and CoCo/O interface termination explains
the high tunnel magnetoresistence (TMR) obtained in similar CoFe/MgO/Co
2
Mn
1.29
Si MTJs [1] because
simulation shows that only the metastable MnMn/O interface termination gives 100% spin polarization
across the CMS/MgO interface [2]. Steps in the MgO barrier induce switching of the interface
termination between MnMn/O and CoCo/O terminations. We also found that increasing Mn
concentration in the CMS electrodes increased the fraction of MnMn/O termination. Other interface
terminations like SiSi/Mg were not observed in the MTJs. The mixed terminations we found at the
CMS/MgO interface provide a key to understand the high TMR and strong temperature dependence of
these MTJs [1].
Figure 1(a) is an HRSTEM image of the MTJ multilayer structure consisting of (from the lower side)
CoFe/MgO/Co
2
Mn
1.29
Si. Steps at the CMS/MgO are visible due to the very flat MgO tunnel barrier.
Figure 1(b) shows CoCo/O and MnMn/O terminations on the left and right side of image, respectively.
The changes of the interface terminations are associated with the steps of the MgO tunnel barrier labeled
by the orange arrows in Figure 1(b). Away from the interface, the L2
1
structure with the Mn and Si
positions interchanged in subsequent MnSi planes is visible in the line profiles in Figure 1(c). At the
interface, all the atomic columns have the same intensity. The distances in Figure 2(a) and (b) between
the last CMS and first MgO layers are 0.20±0.01 nm and 0.25±0.01 nm for the CoCo/O and MnMn/O
terminations, respectively, which are in good agreement with calculations by Hülsen et al. [2]. They
disagree with simulated images based on a disordered MnSi/O interface [3].
The intensity of the atom columns at the interface is suppressed by interfacial strain [4], as shown by
Figure 2(b)-(d). We increased the HAADF detector angles to suppress the interfacial strain contrast in
the STEM images at CMS/MgO interface. The difference between the intensity of the Mn column in the
CMS electrode and that of Mn at the interface decreases with increasing the detector angles. Figure 2(e)
and (f) shows the simultaneously acquired HAADF and ABF STEM images at the CMS/MgO interface.
SiSi/Mg interface termination can be excluded due to the metal-oxygen bonding shown in Figure 2(f).
Our results indicate that the metastable MnMn/O termination is favored by nonequilibrium sputter
deposition with excess Mn in the CMS. The Mn concentration in the CMS also affects the interface
terminations at CMS/MgO interface. Saito et al. reported MnSi/O interface termination at CMS/MgO
interface with a Mn deficient CMS electrode [5], although they did not consider MnMn/O in detail.
Figure 3 shows the fraction of the MnMn/O termination increases with the increasing Mn concentration.
We also found MnSi/O interface termination in the MTJ with Co
2
Mn
0.80
Si electrode, but CoCo/O and
MnMn/O terminations are still the dominant species in our MTJs [6].
336
doi:10.1017/S143192761300367X
Microsc. Microanal. 19 (Suppl 2), 2013
© Microscopy Society of America 2013
https://www.cambridge.org/core/terms. https://doi.org/10.1017/S143192761300367X
Downloaded from https://www.cambridge.org/core. IP address: 168.151.137.97, on 27 Sep 2017 at 22:29:44, subject to the Cambridge Core terms of use, available at