ISSN 10637745, Crystallography Reports, 2011, Vol. 56, No. 3, pp. 531–534. © Pleiades Publishing, Inc., 2011.
Original Russian Text © G.Kh. Azhdarov, Z.M. Zeynalov, Z.A. Agamaliyev, S.O. Mamedova, 2011, published in Kristallografiya, 2011, Vol. 56, No. 3, pp. 570–574.
531
INTRODUCTION
Certain progress has been made in the growth of
single crystals of silicon–germanium solid solutions
over the two last decades. Along with the conventional
Czochralski, Bridgman, and floating zone methods, as
well as their different modifications [1–16], a promis
ing new method [4] has been used to grow these crys
tals. The essence of this method is that a crystal grows
from a melt with a silicon feeding rod through contin
uous constitutional supercooling of the melt at the
crystal–melt interface. Later this method was used to
grow Ge
1– x
Si
x
crystals with a linearly increasing sili
con concentration along the crystallization axis [17, 18].
Note that the name of this method has not been
established in the literature. In [4] and [17] it was
called, respectively, multicomponent zone melting
and diffusion through liquid phase. In this study we
will refer to it as directional constitutional supercool
ing of the melt.
The necessary condition for growing single crystals
of semiconductor solid solutions is a low crystalliza
tion rate. For example, for concentrated solid solu
tions of the Ge
1– x
Si
x
system, the singlecrystal growth
rate is more than two orders of magnitude lower than
the growth rates of their components [2, 6, 9]. This is
caused by the constitutional supercooling of the melt
near the crystal–melt interface. The critical rate above
which the growing Ge
1– x
Si
x
crystal becomes polycrys
talline can be estimated from the relation [2]
(1)
Here, К is the silicon segregation coefficient, х is the
fraction of silicon atoms in the crystal, is the tem
∇θ
= >
∇ −
, ( 1).
( 1)
c
D K
K
TxK
v
∇θ
perature gradient in the melt, is the liquidus
slope, and D = (30 – 24х) × 10
–5
cm/s [2] is the diffu
sion coefficient of silicon in the melt.
In this paper we report a solution to the problem of
the growth dynamics of Ge
1– x
Si
x
crystals with a lin
early changing composition along the crystallization
axis during growth by directional constitutional super
cooling of the melt with a silicon feeding rod. Our pur
pose was to determine the process parameters and
optimal regimes of melt crystallization for growing
germanium–silicon single crystals with a specified
axial gradient of component concentrations.
CONCEPT AND THEORETICAL ANALYSIS
Figure 1 schematically shows the growth of
Ge
1– x
Si
x
single crystals by directional constitutional
supercooling of the melt. A germanium charge is mol
ten above a singlecrystal germanium seed in a heater,
which provides axial linear heating in the working vol
ume (Fig. 1b). After a stabilizing period, a silicon rod
is inserted (with a specified velocity) into the melt
from above. The crystal grows statically, i.e., without
displacing the crucible with respect to the heater. At
the initial instant, the temperature at the crystal–melt
interface is equal to the germanium melting tempera
ture. After some time, part of silicon that dissolved at
the upper boundary of the melt reaches (due to the dif
fusion) the interface. This leads to the formation of the
supercooled melt at the crystal–melt interface and the
growth of a Ge–Si crystal. The continuous increase in
the silicon concentration at the interface leads to an
increase in the melt liquidus temperature. If, at t
1
the
∇
T
CRYSTAL
GROWTH
Growth Dynamics of Ge
1–x
Si
x
Single Crystals Obtained
by Directional Constitutional Supercooling of the Melt
G. Kh. Azhdarov
a
, Z. M. Zeynalov
b
, Z. A. Agamaliyev
a
, and S. O. Mamedova
b
a
Institute of Physics, Azerbaijan National Academy of Sciences,
pr. Dzhavida 33, Baku, AZ1143 Azerbaijan
email: zangi@physics.ab.az
b
Ganja State University, pr. Shakh Ismail Khatai 187, Ganja, Azerbaijan
Received October 4, 2010
Abstract—The problem of growth dynamics for crystals of binary solid solutions, obtained by the constitu
tional supercooling of the melt with a silicon feeding rod, has been solved within the Pfann approximation.
The dependences of the change in the axial growth rate of Ge
1– x
Si
x
crystals (0 ≤ x ≤ 0.3) are calculated. It is
shown that the Ge
1– x
Si
x
crystallization rate significantly changes during growth. The results make it possible
to determine the optimal conditions and technological parameters for growing Ge
1– x
Si
x
single crystals
(0 ≤ x ≤ 0.3) with a specified concentration gradient along the crystallization axis.
DOI: 10.1134/S1063774511030023