Aluminum plasma immersion ion implantation in polymers M. Ueda a, * , I.H. Tan a , R.S. Dallaqua a , J.O. Rossi a , J.J. Barroso a , M.H. Tabacniks b a Instituto Nacional de Pesquisas Espaciais, Laboratorio Associado de Plasmas, Av. dos Astronautas 1758, CEP 12227-010 S~ ao Jose dos Campos, SP, Brazil b Instituto de F  ısica da USP, Travessa R da Rua do Mat ~ ao 187, CEP 05508-900 S~ ao Paulo, SP, Brazil Abstract Atomic oxygen (AO) degradation of polymer-based materials is a serious concern in long life satellites or space stations orbiting low Earth orbit environment. Protection against AO can be achieved by a thin metal oxide layer on the polymerÕs surface. Metal implantation followed by oxidation is a promising way of creating this layer with superior adhesion to the substrate. This work reports on the implantation of Kapton, Mylar, polypropylene and polyethylene samples with aluminum ions at 2.5, 5 and 7 kV, by plasma immersion in a vacuum arc plasma with a straight magnetic filter. With samples oriented with surfaces parallel to the plasma stream SEM and EDS analysis showed no macro- particle contamination and no significant changes in morphology after implantation. Rutherford backscattering spectroscopy showed retained doses of (1–3)  10 16 cm 2 , with most of the aluminum concentrated on the surface. This is probably due to deposition of aluminum between high voltage pulses, and reduction in the sampleÕs surface voltage due to surface charging. Ó 2003 Elsevier Science B.V. All rights reserved. PACS: 52.77.Dq Keywords: Plasma immersion ion implantation; Polymers; Oxidation; Vacuum arcs 1. Introduction Many spacecraft components are made of polymeric materials and polymer-based compos- ites. These materials may suffer accelerated erosion in low Earth orbit environment (200–800 km) due to the presence of the atomic oxygen and the vacuum ultraviolet radiation from the sun and consequently, experience loss of performance. As was demonstrated by conventional ion beam treatment [1] and plasma immersion ion implan- tation [2], polymer samples can attain resistance to chemical attacks as well as increased surface hardness and wear if a metal oxide layer is formed in the surface. This can be achieved after implan- tation of metallic ions and subsequent oxidation, and can be crucial for prolonging the lifetime of new space device generations (required because of the increasing launch payloads and manufacturing costs). The International Space Station for in- stance, is expected to last at least 10–15 years [3]. Implantation of magnesium ions into silicon wafers [4] has been performed in our vacuum arc * Corresponding author. Tel.: +55-12-3945-6676/6715; fax: +55-12-3945-6710. E-mail address: ueda@plasma.inpe.br (M. Ueda). 0168-583X/03/$ - see front matter Ó 2003 Elsevier Science B.V. All rights reserved. doi:10.1016/S0168-583X(03)00844-9 Nuclear Instruments and Methods in Physics Research B 206 (2003) 760–766 www.elsevier.com/locate/nimb