1 Structurally and mechanically tunable molybdenum oxide films and patterned submicrometer structures by electrodeposition A. Quintana 1 , A. Varea 1,2* avarea@el.ub.edu, M. Guerrero 1 , S. Suriñach 1 , M. D. Baró 1 , J. Sort 3# jordi.sort@uab.cat, E. Pellicer 1§ eva.pellicer@uab.cat 1 Departament de Física, Facultat de Ciències, Universitat Autònoma de Barcelona, E- 08193 Bellaterra, Spain. 2 Departament d’Electrònica, Facultat de Física, Universitat de Barcelona, C/ Martí i Franquès 1, E-08028, Barcelona, Spain. 3 Institució Catalana de Recerca i Estudis Avançats (ICREA) and Departament de Física, Universitat Autònoma de Barcelona, E-08193 Bellaterra, Spain. * #§ Corresponding authors. This is the author’s version of a work that was accepted for publication in Electrochimica acta (Elsevier). Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Quintana, A. et al. "Structurally and mechanically tunable molybdenum oxide films and patterned submicrometer structures by electrodeposition", Electrochimica Acta, vol. 173, Aug. 2015, p.705–714. This is the author’s version of a work that was accepted for publication in Electrochimica acta (Elsevier). DOI 10.1016/j.electacta.2015.05.112