Purdue University Purdue e-Pubs Birck and NCN Publications Birck Nanotechnology Center 6-1-2014 Electrical breakdown in polymers for BEOL applications: Dielectric heating and humidity efects Sambit Palit Purdue University, spalit@purdue.edu Muhammad Ashraful Alam Purdue University, alam@purdue.edu Follow this and additional works at: htp://docs.lib.purdue.edu/nanopub Part of the Electronic Devices and Semiconductor Manufacturing Commons , and the Nanotechnology Fabrication Commons Tis document has been made available through Purdue e-Pubs, a service of the Purdue University Libraries. Please contact epubs@purdue.edu for additional information. Palit, Sambit and Alam, Muhammad Ashraful, "Electrical breakdown in polymers for BEOL applications: Dielectric heating and humidity efects" (2014). Birck and NCN Publications. Paper 1610. htp://dx.doi.org/10.1109/IRPS.2014.6861114