This content has been downloaded from IOPscience. Please scroll down to see the full text. Download details: IP Address: 93.180.53.211 This content was downloaded on 13/02/2014 at 20:03 Please note that terms and conditions apply. Nonlinear heat-transfer macromodeling for MEMS thermal devices View the table of contents for this issue, or go to the journal homepage for more 2005 J. Micromech. Microeng. 15 408 (http://iopscience.iop.org/0960-1317/15/2/022) Home Search Collections Journals About Contact us My IOPscience