Interface-controlled high dielectric constant Al2O3/TiOx nanolaminates with low loss and low leakage current density for new generation nanodevices Geunhee Lee, Bo-Kuai Lai, Charudatta Phatak, Ram S. Katiyar, and Orlando Auciello Citation: J. Appl. Phys. 114, 027001 (2013); doi: 10.1063/1.4811810 View online: http://dx.doi.org/10.1063/1.4811810 View Table of Contents: http://jap.aip.org/resource/1/JAPIAU/v114/i2 Published by the AIP Publishing LLC. Additional information on J. Appl. Phys. Journal Homepage: http://jap.aip.org/ Journal Information: http://jap.aip.org/about/about_the_journal Top downloads: http://jap.aip.org/features/most_downloaded Information for Authors: http://jap.aip.org/authors Downloaded 10 Jul 2013 to 129.110.242.6. This article is copyrighted as indicated in the abstract. Reuse of AIP content is subject to the terms at: http://jap.aip.org/about/rights_and_permissions