Materials Science and Engineering B 159–160 (2009) 14–17
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Materials Science and Engineering B
journal homepage: www.elsevier.com/locate/mseb
Memory effects in MIS structures based on silicon and polymethylmethacrylate
with nanoparticle charge-storage elements
M.F. Mabrook
a,∗
, A.S. Jombert
a,b
, S.E. Machin
a
, C. Pearson
a
, D. Kolb
a
,
K.S. Coleman
b
, D.A. Zeze
a
, M.C. Petty
a
a
School of Engineering and Centre for Molecular and Nanoscale Electronics, Durham University, South Road, Durham DH1 3LE, UK
b
Department of Chemistry, Durham University, South Road, Durham DH1 3LE, UK
article info
Article history:
Received 2 May 2008
Accepted 1 September 2008
Keywords:
Gold nanoparticles
C60
Carbon nanotubes
PMMA
Memory devices
abstract
We report on the electrical behaviour of metal–insulator–semiconductor (MIS) structures fabricated on
p-type silicon substrates and using polymethylmethacrylate (PMMA) as the dielectric. Gold nanoparticles,
single-wall carbon nanotubes and C
60
, deposited at room temperature, were used as charge-storage ele-
ments. In all cases, the MIS devices containing the nanoparticles exhibited hysteresis in their capacitance
versus voltage characteristics, with a memory window depending on the range of the voltage sweep. This
hysteresis was attributed to the charging and discharging of the nanoparticles from the gate electrode.
A relatively large memory window of about 2.2V was achieved by scanning the applied voltage of an
Al/PMMA/C
60
/SiO
2
/Si structure between 4 and -4 V. Gold nanoparticle-based memory devices produced
the best charge retention behaviour compared to the other MIS structures investigated.
© 2008 Elsevier B.V. All rights reserved.
1. Introduction
Memories fabricated from metal–insulator–semiconductor
(MIS) structures incorporating nanoparticulate materials as the
charge-storage elements are receiving considerable attention in the
literature. Devices based on organic materials have the potential to
overcome many of the fabrication problems associated with silicon
structures. For example, organic materials can be deposited at room
temperature on almost all surfaces, including flexible substrates,
by low-cost methods. Various storage media have been reported,
including: aluminium nanocrystals [1], germanium nanocrystals
[2], gold nanocrystals [3] and Au nanoparticles [4,5]. Charging of
the nanomaterials occurs on the application of a voltage to the
gate electrode by electron transport, either through a thin tun-
nelling oxide [3] or via the top insulator [6]. Some recent research
has explored the use of high-k dielectrics for the formation of the
tunnelling oxide [7].
Carbon nanotubes are attractive materials for nanotechnol-
ogy applications because of their exceptional electronic properties
and mechanical strength [8]. A typical single-wall carbon nan-
otube (SWCNT) has dimensions of about 1.2nm in diameter
and 1–20 m in length. As such, SWCNTs offer an attractive
proposition as conductive wires in micro- or nano-scale elec-
∗
Corresponding author. Tel.: +44 1913342435; fax: +44 1913342407.
E-mail address: m.f.mabrook@durham.ac.uk (M.F. Mabrook).
tronic devices. Many applications have now been suggested for
nanotubes, including field-effect transistors, advanced composite
materials and chemical sensors [9,10]. There are a few reports of
SWCNT-based MIS memory structures and the combination of the
fullerene C
60
with poly(4-vinylphenol) (PVP) has been shown to
produce a large hysteresis in the current–voltage characteristics of
metal–insulator–metal structures [11,12].
In our previous work [6,13,14], we have reported on MIS devices
and transistor structures in which a monolayer of gold nanoparti-
cles was incorporated into Langmuir–Blodgett (LB) insulating films.
Here, we extend our studies to other storage charge elements, in
particular single-wall carbon nanotubes and C
60
and compare the
devices to those based on gold nanoparticles. In this investiga-
tion, we used a thin film of polymethylmethacrylate (PMMA) as
the insulating layer.
2. Experimental details
The preparation of the gold nanoparticle solution involved
adding 1 ml of 1% aqueous HAuCl
4
·3H
2
O (99.9%) to 100 ml of
deionised water under vigorous stirring. After 1 min, 1 ml of 1%
aqueous sodium citrate was added, followed by 1ml of 0.075%
NaBH
4
(99.99%) in 1% sodium citrate 1min later. The solution was
stirred for a further 5 min and then stored in the refrigerator at
about 4
◦
C. The resulting gold nanoparticles were approximately
5nm in diameter, including the thickness of the organic capping
layer.
0921-5107/$ – see front matter © 2008 Elsevier B.V. All rights reserved.
doi:10.1016/j.mseb.2008.09.003