Formation of self-assembled heteroepitaxial islands in elastically anisotropic films P. Liu, 1 Y. W. Zhang, 2, * and C. Lu 1 1 Institute of High-Performance Computing, Singapore 2 Department of Materials Science, National University of Singapore, Singapore and Institute of Materials Research and Engineering, Singapore Received 7 May 2002; revised manuscript received 5 September 2002; published 25 April 2003 The formation of self-assembled heteroepitaxial islands in elastically anisotropic cubic films is investigated by a three-dimensional dynamic method. In the formulation, the 100film surfaces evolve through surface diffusion driven by the gradient of the surface chemical potential. Our simulations reveal that when the elastic anisotropic strength A A is defined as 2 C 44 /( C 11 -C 12 ), where C 11 , C 12 , and C 44 are elastic constantsis larger than 1 the formed islands are preferentially aligned along 100directions, while when A is smaller than 1 the formed islands are preferentially aligned along the 110directions. It is found that the stronger the elastic anisotropy, the stronger the island self-assembly. In addition, the island alignment and averaged island spacing right after island formation are found to be related to the smallest fastest surface instability wavelength of the elastically anisotropic films. DOI: 10.1103/PhysRevB.67.165414 PACS numbers: 81.16.Dn, 68.35.Fx, 68.55.-a I. INTRODUCTION During heteroepitaxial growth, a film may undergo a growth mode transition—that is, from a layer-by-layer growth mode to a three-dimensional growth mode. 1 Through such a transition, the film forms a rippled structure, which eventually breaks up into islands. Since these islands are normally dislocation free, the self-assembly process may be used to fabricate quantum dot arrays, which have many po- tential applications in microelectronic and optoelectronic de- vices. The performance of these devices requires a uniform and regular arrangement of quantum dot arrays. Although many attempts have been made to grow a uniform and regu- lar array of quantum dots through self-assembly, 2–8 so far there are no reliable procedures to do so. The surface roughness and subsequent island formation are caused by the competition between the strain energy and surface energy of the system. During the surface evolution, the total strain energy decreases while the total surface en- ergy increases. A first-order perturbation has been carried out to analyze the critical condition of strain-induced surface roughening for both elastic isotropic films 9–12 and elastic an- isotropic films. 13,14 These analyses have shown that for a perturbed wavelength , if c , where c is the critical wavelength, the strain energy will dominate the process, and therefore island formation becomes energetically favorable, while if c , the surface energy will dominate the pro- cess, and therefore the surface will remain flat. Of particular interest is the film having elastic anisotropy. In this scenario, the critical wavelength depends not only on the surface orientation, 14 but also on the elastic anisotropy strength. Therefore, tuning the elastic anisotropy of the film may change the island spacing and alignment, providing another degree of freedom to manipulate the self-assembly of quan- tum dot growth. For an elastically isotropic crystal, there are only two in- dependent elastic constants: the elastic modulus E and Poisson’s ratio . For cubic crystals, there are three indepen- dent elastic constants in the reference coordinate system: namely, C 11 , C 12 , and C 44 . The elastic property may be expressed in terms of the elastic modulus E, Poisson’s ratio , and the elastic anisotropy strength A. The two sets of elastic constants have the following relationships: E =C 11 2 +C 11 C 12 -2 C 12 2 / C 11 +C 12 , v=C 12 / C 11 +C 12 , A=2 C 44 / C 11 -C 12 . 1 Table I lists the anisotropy strength for a number of com- monly used crystals. It is seen that the variation of the elastic anisotropy strength is large, ranging from 0.26 for PbTe to 5.2 for InN. Therefore it is important to understand the effect of the elastic anisotropy on the surface evolution and the self-assembly of quantum dots. In this paper, we will examine the effect of the elastic anisotropy on the surface evolution through annealing pro- cesses. Our attention is focused on the effect of the elastic anisotropy on the island self-assembly and the relationship between the simulation results and first-order perturbation results. TABLE I. Elastic anisotropy strength =2 C 44 /( C 11 -C 12 ) for a number of commonly used crystals Ref. 15. Crystal Elastic anisotropy strength A PbTe 0.26 PbSe 0.30 PbS 0.51 Diamond 1.21 Si 1.51 Ge 1.66 GaAs 1.83 GaN 2.9 InN 5.2 PHYSICAL REVIEW B 67, 165414 2003 0163-1829/2003/6716/1654146/$20.00 ©2003 The American Physical Society 67 165414-1