Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach Laurent Latorre, V. Beroulle, Pascal Nouet To cite this version: Laurent Latorre, V. Beroulle, Pascal Nouet. Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, Institute of Electrical and Electronics Engineers, 2004, 23 (6), pp.962-967. <lirmm-00108542> HAL Id: lirmm-00108542 http://hal-lirmm.ccsd.cnrs.fr/lirmm-00108542 Submitted on 23 Oct 2006 HAL is a multi-disciplinary open access archive for the deposit and dissemination of sci- entific research documents, whether they are pub- lished or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L’archive ouverte pluridisciplinaire HAL, est destin´ ee au d´ epˆ ot et ` a la diffusion de documents scientifiques de niveau recherche, publi´ es ou non, ´ emanant des ´ etablissements d’enseignement et de recherche fran¸cais ou ´ etrangers, des laboratoires publics ou priv´ es.