Chapter 5
Sensors and Actuators on CMOS Platforms
Mark Lantz, Christoph Hagleitner, Michel Despont, Peter Vettiger,
Mario Cortese, and Benedetto Vigna
Abstract The monolithic or hybrid integration of sensors and actuators (S&A) onto
CMOS platforms is of great importance to reduce the device size and cost as well
as to facilitate new functionalities and better performance. Hence, S&As on CMOS
platforms are important and convincing examples of “more than Moore.” This chap-
ter focuses on a broad range of aspects of S&As on CMOS platforms. First, the basic
concept is introduced, followed by a detailed description of the fundamentals of cur-
rent S&A concepts. The current market situation is then described, demonstrating
the great opportunities for S&As. A substantial part of the chapter is devoted to the
various techniques and fabrication processes for monolithic and hybrid integration
of S&As on CMOS. Successful examples of very large-scale integration (VLSI) of
S&As on CMOS platforms are also described. Current research into the use
nanostructures for new or better S&A functionalities or improved performance is
described in an additional subsection. Finally, the equally important back-end-of-
the-line aspects in large-volume production, packaging, and testing are presented.
The chapter closes with the authors’ outlook and view on the challenges and oppor-
tunities in research, development, production, and marketing of new and better
S&As, VLSI-type S&As on single-chip CMOS platforms, and S&A networks.
Keywords Sensors•Actuators•CMOS•MEMS•NEMS•Nanotechnology
5.1 Introduction
Today sensors and actuators (S&As) are used almost everywhere to sense and
monitor parameters and to control actions of importance and interest in our daily
environment accordingly. They play an essential role as an interface between the
M. Lantz (), C. Hagleitner, M. Despont and P. Vettiger
IBM Zurich Research Laboratory, 8803, Rüschlikon, Switzerland
e-mail: mla@zurich.ibm.com
M. Cortese and B. Vigna
STMicroelectronics,MEMS&HealthcareProductDivision,20010Cornaredo(Milano),Italy
G.Q. Zhang and A.J. van Roosmalen (eds.), More than Moore: Creating High Value 109
Micro/Nanoelectronics Systems,
DOI 10.1007/978-0-387-75593-9_5, © Springer Science + Business Media, LLC 2009